Internal registration numberIMiO/2011/NCN/5
Project StatusImplemented
Project typeProjects financed by NSC [Projekty finansowane przez NCN]
Project type / Program / Subprogram/ edition/contest (POL-on)projekt naukowy finansowany przez Narodowe Centrum Nauki (05)
Implementing unit from WUTThe Institute of Microelectronics and Optoelectronics (FEIT / MO) (Faculty of Electronics and Information Technology (FEIT))
Title in PolishTechnologia i charakteryzacja ultracienkich warstw krzemu wytwarzanych metodą PECVD na potrzeby struktur nanoelektronicznych
Title in Englishxxx
Agreement numberUMO-2011/03/B/ST7/02595
Decision numberDEC-2011/03/B/ST7/02595
Other identifiers2011/03/B/ST/02595
Beginning date30-08-2012
Planned end date29-08-2015
Project duration (in months)0
Project subject classFundamental research
Cooperation leveldomestic
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