Metodyka eliminacji wpływu zakłóceń periodycznych na obrazy rejestrowane w skaningowej mikroskopii elektronowej

Mariusz Płuska

Abstract

The dissertation concerns the reduction of periodic distortions of scanning electron microscopy (SEM) images. Several different kinds of SEM-image distortions were revealed, which can be separated due to differences in their origin and the manner of their influence on several various components of SEM system. Descriptions of these distortions with use of mathematical models are given. The influence of alternating magnetic field on the electron beam in SEM column, chamber and the electric circuits of SEM was investigated. A new method of measurement of magnetic field being present in SEM chamber was invented, applied and checked. The method bases on analysis of multiple SEM images. In order to reduce SEM-image distortions new methods of electron-beam screening and new algorithms of image correction with use of digital signal processing were proposed, applied and confirmed.
Diploma typeDoctor of Philosophy
Author Mariusz Płuska (FoEE)
Mariusz Płuska,,
- Faculty of Electrical Engineering
Title in PolishMetodyka eliminacji wpływu zakłóceń periodycznych na obrazy rejestrowane w skaningowej mikroskopii elektronowej
Languagepl polski
Certifying UnitFaculty of Electrical Engineering (FoEE)
Disciplineelectronic engineering / (technology domain) / (technological sciences)
Start date28-06-2006
Defense Date21-05-2010
End date23-06-2010
Supervisor Remigiusz Rak (FoEE / ITEEMIS)
Remigiusz Rak,,
- The Institute of the Theory of Electrical Engineering, Measurement and Information Systems

Internal reviewers Sławomir Tumański (FoEE / ITEEMIS)
Sławomir Tumański,,
- The Institute of the Theory of Electrical Engineering, Measurement and Information Systems
External reviewers Jacek Marczewski
Jacek Marczewski,,
-
Pages104
Keywords in Englishxxx
Abstract in EnglishThe dissertation concerns the reduction of periodic distortions of scanning electron microscopy (SEM) images. Several different kinds of SEM-image distortions were revealed, which can be separated due to differences in their origin and the manner of their influence on several various components of SEM system. Descriptions of these distortions with use of mathematical models are given. The influence of alternating magnetic field on the electron beam in SEM column, chamber and the electric circuits of SEM was investigated. A new method of measurement of magnetic field being present in SEM chamber was invented, applied and checked. The method bases on analysis of multiple SEM images. In order to reduce SEM-image distortions new methods of electron-beam screening and new algorithms of image correction with use of digital signal processing were proposed, applied and confirmed.
Thesis file
Pluska.pdf 8.56 MB
Citation count*5 (2020-09-26)

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