Full nameJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
ISSN2166-2754
PublisherAVS Science and Technology Society
SherpaRomeo
Languageen angielski
Foreign editionyes
Score (nominal)0
Listno
Series typejournalseries
ASJC Classification2505 Materials Chemistry; 2208 Electrical and Electronic Engineering; 2508 Surfaces, Coatings and Films; 1508 Process Chemistry and Technology; 3105 Instrumentation; 2504 Electronic, Optical and Magnetic Materials
StatusActive
Additional system fieldsscopusImport: ext_list_October_2017_3.xlsx
scopusServiceUpdateTimestamp: 1572036022726
Record administratorxeditor_PW

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