Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann , Wolfgang Osten , Armando Albertazzi Gonçalves Jr.
AbstractTime averaging interferometry is one of the techniques that allows to investigate a dynamic behaviour of MEMS elements. The information of the maximum amplitude of vibration is encoded in the argument of Bessel function. Many different approaches enable evaluation of this value. Due to the fact that accuracy of the result depends on the quality of the input data, Bessel function of a good quality must be calculated first. Wide range of modulation distribution calculation methods enable to obtain absolute or square value of J0. These results are more difficult in processing than pure Bessel function because of gradient function discontinuity or poor SNR. For ensuring smaller errors one may normalize absolute values of J0 by the sign of the function. In this paper, several different algorithms for determining the sign of Bessel function were investigated and compared. For each approach accuracy of the method was calculated. In the end, the best solution was found.
|Publisher||SPIE – The International Society for Optics and Photonics, MNiSW |
|Book series /Journal (in case of Journal special issue)||Proceedings of SPIE: The International Society for Optical Engineering, ISSN 0277-786X, e-ISSN 1996-756X, (0 pkt)|
|Conference||SPIE Optical Metrology, 24-06-2019 - 27-07-2019, Munich, Niemcy|
|Score||= 20.0, 28-10-2019, MonograhOrBookMainLanguagesEditor|
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