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Optical Inspection of Microsystems (Second Edition)

Editors:

  • Wolfgang Osten

Abstract

Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts.

Metrics

Record ID
WUTa8b4b98908c042e6b6ce2645bd1ad68f
Book type
Monograph
Editor
Wolfgang Osten Wolfgang Osten,, Undefined Affiliation
Publisher (from the publisher list)
CRC Press / Balkema
Publishing place (Publisher address)
London, New York
Pages
570
Publication size in sheets
28.50
ISBN
978-1-4987-7947-0
Issue year
2020
DOI
Go to the document by digital ID DOI:10.1201/9780429186738 Opening in a new tab
URL
https://www.crcpress.com/Optical-Inspection-of-Microsystems-Second-Edition/Osten/p/book/9781498779470 Opening in a new tab
Language
(en) English
Score (nominal)
20
Score source
publisherList
book.scoring
Ministerial score = 20.0, 27-04-2022, MonograhOrBookMainLanguagesEditor

Cite


Uniform Resource Identifier
https://repo.pw.edu.pl/info/book/WUTa8b4b98908c042e6b6ce2645bd1ad68f/
URN
urn:pw-repo:WUTa8b4b98908c042e6b6ce2645bd1ad68f

* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or PerishOpening in a new tab system.


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