High Q-Factor Millimeter-Wave Silicon Resonators

Jerzy Krupka , Paweł Kamiński , Leif Jensen

Abstract

Resonators made of high-resistivity silicon (HRS) have been manufactured, and their characteristics were measured at a frequency range from 20 to 50 GHz. To study the influence of the material resistivity on Q-factor values, two HRSs were used. The first one was as-grown high-purity floating zone (FZ) silicon with a resistivity of ∼70 kΩ ⋅ cm. The second was FZ silicon irradiated with high-energy protons. The resistivity of the irradiated silicon was essentially the same as that of intrinsic silicon with a resistivity of ∼400 kΩ ⋅ cm at room temperature. Several whispering gallery modes were identified and measured on disk shape samples made on both materials. At room temperature and at a frequency of 50 GHz, the Q-factor values for the resonators made of the as-grown and the irradiated silicon are up to 1.8×104 and up to 6×104 , respectively.
Author Jerzy Krupka IMiO
Jerzy Krupka,,
- The Institute of Microelectronics and Optoelectronics
, Paweł Kamiński
Paweł Kamiński,,
-
, Leif Jensen
Leif Jensen,,
-
Journal seriesIEEE Transactions on Microwave Theory and Techniques, ISSN 0018-9480
Issue year2016
Vol64
No12
Pages4149-4154
Keywords in Englishwhispering gallery modes (WGMs), Complex permittivity, dielectric resonator, resistivity, semi-insulating silicon
DOIDOI:10.1109/TMTT.2016.2607712
URL http://ieeexplore.ieee.org/document/7572920/
projectThe Development of Design, Processing and Testing Methods of the Electronic Devices and Materials for Microelectronics and Optoelectronics. Project leader: Szczepański Paweł, , Phone: (48 22) 234 58 70, start date 01-01-2015, planned end date 31-12-2015, end date 31-05-2016, IMiO/2015/STATUT/1, Implemented
WEiTI Działalność statutowa
Languageen angielski
Score (nominal)35
ScoreMinisterial score [Punktacja MNiSW] = 35.0, 27-03-2017, ArticleFromJournal
Ministerial score (2013-2016) [Punktacja MNiSW (2013-2016)] = 35.0, 27-03-2017, ArticleFromJournal
Publication indicators WoS Impact Factor [Impact Factor WoS]: 2016 = 2.897 (2) - 2016=3.26 (5)
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