Accurate DHM method for topography characterization of reflective microoptics

Marta Mikuła , Tomasz Kozacki

Abstract

In this paper the new measurement method for topography characterization of reflective microoptics is presented. The proposed measurement method is based on digital holographic microscope (DHM) system utilizing spherical wave illumination. The method permits to obtain full characterization of shape parameters of high numerical aperture (NA) microstructures such as micromolds [1]. For numerical reconstruction of topography of high NA micromolds modified Spherical Local Ray Approximation (SLRA) algorithm has been employed. We present results of topography reconstruction of triangular reflective micromolds.
Author Marta Mikuła IMiF
Marta Mikuła,,
- The Institute of Micromechanics and Photonics
, Tomasz Kozacki IMiF
Tomasz Kozacki,,
- The Institute of Micromechanics and Photonics
Pages541-546
Publication size in sheets0.5
Book Jabłoński Ryszard, Brezina Tomas (eds.): Advanced Mechatronics Solutions, Advances in Intelligent Systems and Computing, 2016, Springer, ISBN 978-3-319-23921-7, 668 p., DOI:10.1007/978-3-319-23923-1
Keywords in Englishdigital holographic microscopy topography reconstruction microoptics
DOIDOI:10.1007/978-3-319-23923-1_79
URL http://link.springer.com/chapter/10.1007/978-3-319-23923-1_79
Languageen angielski
Score (nominal)15
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