Accurate DHM method for topography characterization of reflective microoptics

Marta Mikuła , Tomasz Kozacki


In this paper the new measurement method for topography characterization of reflective microoptics is presented. The proposed measurement method is based on digital holographic microscope (DHM) system utilizing spherical wave illumination. The method permits to obtain full characterization of shape parameters of high numerical aperture (NA) microstructures such as micromolds [1]. For numerical reconstruction of topography of high NA micromolds modified Spherical Local Ray Approximation (SLRA) algorithm has been employed. We present results of topography reconstruction of triangular reflective micromolds.
Author Marta Mikuła (FM / IMPh)
Marta Mikuła,,
- The Institute of Micromechanics and Photonics
, Tomasz Kozacki (FM / IMPh)
Tomasz Kozacki,,
- The Institute of Micromechanics and Photonics
Publication size in sheets0.5
Book Jabłoński Ryszard, Březina Tomáš (eds.): Advanced Mechatronics Solutions, Advances in Intelligent Systems and Computing, 2016, Springer, ISBN 978-3-319-23921-7, 668 p., DOI:10.1007/978-3-319-23923-1
Keywords in Englishdigital holographic microscopy topography reconstruction microoptics
Languageen angielski
Score (nominal)15
ScoreMinisterial score = 15.0, 04-09-2019, BookChapterSeriesAndMatConfByIndicator
Ministerial score (2013-2016) = 15.0, 04-09-2019, BookChapterSeriesAndMatConfByIndicator
Publication indicators WoS Citations = 0
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