Accurate DHM method for topography characterization of reflective microoptics
Marta Mikuła , Tomasz Kozacki
AbstractIn this paper the new measurement method for topography characterization of reflective microoptics is presented. The proposed measurement method is based on digital holographic microscope (DHM) system utilizing spherical wave illumination. The method permits to obtain full characterization of shape parameters of high numerical aperture (NA) microstructures such as micromolds . For numerical reconstruction of topography of high NA micromolds modified Spherical Local Ray Approximation (SLRA) algorithm has been employed. We present results of topography reconstruction of triangular reflective micromolds.
|Publication size in sheets||0.5|
|Book||Jabłoński Ryszard, Březina Tomáš (eds.): Advanced Mechatronics Solutions, Advances in Intelligent Systems and Computing, 2016, Springer, ISBN 978-3-319-23921-7, 668 p., DOI:10.1007/978-3-319-23923-1|
|Keywords in English||digital holographic microscopy topography reconstruction microoptics|
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