Ultrathin NbN films for superconducting single-photon detectors

Wojciech Słysz , Marek Guziewicz , Michał A. Borysiewicz , Jarosław Z. Domagala , Iwona Pasternak , K. Hejduk , Witold Rzodkiewicz , Jacek Ratajczak , Jan Bar , M. Wȩgrzecki , Piotr Grabiec , R. Grodecki , I. Wȩgrzecka , R. Sobolewski

Abstract

We present our research on fabrication and structural and transport characterization of ultrathin superconducting NbN layers deposited on both single-crystal Al2O3 and Si wafers, and SiO2 and Si 3N4 buffer layers grown directly on Si wafers. The thicknesses of our films varied from 6 nm to 50 nm and they were grown using reactive RF magnetron sputtering on substrates maintained at the temperature 850°C. We have performed extensive morphology characterization of our films using the X-ray diffraction method and atomic force microscopy, and related the results to the type of the substrate used for the film deposition. Our transport measurements showed that even the thinnest, 6 nm thick NbN films had the superconducting critical temperature of 10-12 K, which was increased to 14 K for thicker films.

Author Wojciech Słysz - [Instytut Technologii Elektronowej]
Wojciech Słysz,,
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, Marek Guziewicz - Institute of Electron Technology (ITE) [Instytut Technologii Elektronowej]
Marek Guziewicz,,
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, Michał A. Borysiewicz - Institute of Electron Technology [Instytut Technologii Elektronowej]
Michał A. Borysiewicz,,
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, Jarosław Z. Domagala - [Institute of Physics of the Polish Academy of Sciences]
Jarosław Z. Domagala,,
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, Iwona Pasternak - Institute of Electron Technology (ITE)
Iwona Pasternak,,
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, K. Hejduk - [Instytut Technologii Elektronowej]
K. Hejduk,,
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, Witold Rzodkiewicz - [Instytut Technologii Elektronowej]
Witold Rzodkiewicz,,
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, Jacek Ratajczak (FEIT / MO)
Jacek Ratajczak,,
- The Institute of Microelectronics and Optoelectronics
, Jan Bar - Institute of Electron Technology [Instytut Technologii Elektronowej]
Jan Bar,,
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, M. Wȩgrzecki - [Instytut Technologii Elektronowej]
M. Wȩgrzecki,,
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et al.`
Journal seriesActa Physica Polonica A, ISSN 0587-4246, e-ISSN 1898-794X, (A 15 pkt)
Issue year2011
Vol120
Pages200-203
ASJC Classification3100 General Physics and Astronomy
DOIDOI:10.12693/APhysPolA.120.200
Languageen angielski
Score (nominal)15
Score sourcejournalList
Publication indicators Scopus Citations = 10; WoS Citations = 10; Scopus SNIP (Source Normalised Impact per Paper): 2011 = 0.453; WoS Impact Factor: 2011 = 0.444 (2) - 2011=0.404 (5)
Citation count*16 (2020-01-29)
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