Relation between modulation frequency of electric power oscillation during pulse magnetron sputtering deposition of MoNx thin films

Bartosz Wicher , Rafał Chodun , Katarzyna Nowakowska-Langier , Sebastian Okrasa , Marek Trzciński , Krystian Bogumił Król , Roman Minikayev , Łukasz Skowroński , Łukasz Kurpaska , Krzysztof Zdunek

Abstract

This work reports the results of a study, concerning the synthesis of molybdenum nitride thin films, by DC Pulsed Magnetron Sputtering method (PMS), operating with 100 kHz main frequency, and modulated by the additional frequency, adjustable in the range of 10–1000 Hz (modulated Pulse Magnetron Sputtering – mPMS). We have studied the influence of mPMS on the state of plasma using optical emission spectroscopy technique (OES). X-ray photoelectron spectroscopic analysis (XPS) and X-ray diffractometry (XRD) were also used to investigate the relationship between phase composition and modulation frequency of Mo-N thin films. These investigations have revealed a presence of low-temperature phases of β-Mo16N7 and δ-MoN, confirming correlation between chemical state of Mo 3d3/2, 3d5/2 or 3p3/2 and amount of nitrogen incorporation in Mo-N structures. Films’ morphology was well examined by scanning electron microscopy (SEM) and consists the nanocrystalline/amorphous domains. From the utilitarian point of view, very good thermal stability, promising mechanical properties being: H ∼ 16 GPa, E∗ ∼ 180 GPa (NanoTest) and low value of resistivity below 650 μΩcm (4-point probe method) of the Mo-N, predestine them as an effective diffusion barrier in Cu-wired MOSFET structures. Results confirmed that additional modulation frequency should be considered as a significant factor of electric power oscillation during reactive synthesis by means of PMS-based method.
Author Bartosz Wicher
Bartosz Wicher,,
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, Rafał Chodun (FMSE / DSE)
Rafał Chodun,,
- Division of Surface Engineering
, Katarzyna Nowakowska-Langier
Katarzyna Nowakowska-Langier,,
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, Sebastian Okrasa (FMSE / DSE)
Sebastian Okrasa,,
- Division of Surface Engineering
, Marek Trzciński - Uniwersytet Technologiczno-Przyrodniczy im. Jana i Jędrzeja Śniadeckich w Bydgoszczy (UTP)
Marek Trzciński,,
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, Krystian Bogumił Król (FEIT / MO)
Krystian Bogumił Król,,
- The Institute of Microelectronics and Optoelectronics
, Roman Minikayev
Roman Minikayev,,
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, Łukasz Skowroński - Uniwersytet Technologiczno-Przyrodniczy im. Jana i Jędrzeja Śniadeckich w Bydgoszczy (UTP)
Łukasz Skowroński,,
-
, Łukasz Kurpaska - National Centre for Nuclear Research, ul. A. Sołtana7, 05-400 Otwock-Świerk, Poland
Łukasz Kurpaska,,
-
, Krzysztof Zdunek (FMSE / DSE)
Krzysztof Zdunek,,
- Division of Surface Engineering
Journal seriesApplied Surface Science, ISSN 0169-4332, (A 35 pkt)
Issue year2018
Vol456
No31 October 2018
Pages789-796
Publication size in sheets0.5
Keywords in EnglishModulated pulse magnetron sputtering; Molybdenum nitride; Cu-wired MOSFET structures; Diffusion barrier; Plasma&films characterization
DOIDOI:10.1016/j.apsusc.2018.06.179
URL https://www.sciencedirect.com/science/article/pii/S016943321831746X
Languageen angielski
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Relation between modulation frequency of electric power oscillation during.pdf 1.85 MB
Score (nominal)35
ScoreMinisterial score = 35.0, 28-06-2018, ArticleFromJournal
Ministerial score (2013-2016) = 35.0, 28-06-2018, ArticleFromJournal
Publication indicators WoS Impact Factor: 2016 = 3.387 (2) - 2016=3.184 (5)
Citation count*1 (2018-10-28)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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