Capability for Fine Tuning of the Refractive Index Sensing Properties of Long-Period Gratings by Atomic Layer Deposited Al2O3 Overlays

Mateusz Jakub Śmietana , Marcin Myśliwiec , Predrag Mikulic , Bartłomiej S. Witkowski , Wojtek J. Bock


This work presents an application of thin aluminum oxide (Al2O3) films obtained using atomic layer deposition (ALD) for fine tuning the spectral response and refractive-index (RI) sensitivity of long-period gratings (LPGs) induced in optical fibers. The technique allows for an efficient and well controlled deposition at monolayer level (resolution ~ 0.12 nm) of excellent quality nano-films as required for optical sensors. The effect of Al2O3 deposition on the spectral properties of the LPGs is demonstrated experimentally and numerically. We correlated both the increase in Al2O3 thickness and changes in optical properties of the film with the shift of the LPG resonance wavelength and proved that similar films are deposited on fibers and oxidized silicon reference samples in the same process run. Since the thin overlay effectively changes the distribution of the cladding modes and thus also tunes the device’s RI sensitivity, the tuning can be simply realized by varying number of cycles, which is proportional to thickness of the high-refractive-index (n > 1.6 in infrared spectral range) Al2O3 film. The advantage of this approach is the precision in determining the film properties resulting in RI sensitivity of the LPGs. To the best of our knowledge, this is the first time that an ultra-precise method for overlay deposition has been applied on LPGs for RI tuning purposes and the results have been compared with numerical simulations based on LP mode approximation.
Author Mateusz Jakub Śmietana (FEIT / MO)
Mateusz Jakub Śmietana,,
- The Institute of Microelectronics and Optoelectronics
, Marcin Myśliwiec (FEIT / MO)
Marcin Myśliwiec,,
- The Institute of Microelectronics and Optoelectronics
, Predrag Mikulic - [Universite du Quebec en Outaouais]
Predrag Mikulic,,
, Bartłomiej S. Witkowski - [Institute of Physics of the Polish Academy of Sciences]
Bartłomiej S. Witkowski,,
, Wojtek J. Bock - [Universite du Quebec en Outaouais]
Wojtek J. Bock,,
Corporate authorInstitute of Microelectronics and Optoelectronisc (IMiO)
Journal seriesSensors, [SENSORS-BASEL], ISSN 1424-8220
Issue year2013
Publication size in sheets0.55
Keywords in Englishoptical fiber sensors; refractive index sensor; long-period gratings (LPG); Atomic Layer Deposition (ALD); thin films; optical properties; aluminum oxide (Al2O3)
ASJC Classification2208 Electrical and Electronic Engineering; 1303 Biochemistry; 3107 Atomic and Molecular Physics, and Optics; 1602 Analytical Chemistry
Languageen angielski
Score (nominal)30
Score sourcejournalList
ScoreMinisterial score = 30.0, 23-04-2020, ArticleFromJournal
Ministerial score (2013-2016) = 30.0, 23-04-2020, ArticleFromJournal
Publication indicators Scopus Citations = 35; WoS Citations = 34; GS Citations = 38.0; Scopus SNIP (Source Normalised Impact per Paper): 2014 = 1.705; WoS Impact Factor: 2013 = 2.048 (2) - 2013=2.457 (5)
Citation count*40 (2020-09-22)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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