Titanium(IV) isopropoxide as a source of titanium and oxygen atoms in carbon based coatings deposited by Radio Frequency Plasma Enhanced Chemical Vapour Deposition method
Authors:
- Anna Jędrzejczak,
- Damian Batory,
- Milena Prowizor,
- Magdalena Dominik,
- Mateusz Jakub Śmietana,
- Michał Cichomski,
- Aneta Kisielewska,
- Witold Szymański,
- Witold Kozlowski,
- Mariusz Dudek
Abstract
This paper presents properties of TiOx-DLC (titanium oxides incorporated diamond like carbon) coatings deposited by RF PECVD (Radio Frequency Plasma Enhanced Chemical Vapour Deposition) method using combination of methane (CH4) and titanium(IV) isopropoxide (Ti[OCH(CH3)2]4) atmospheres. The obtained results show that the deposition process of TiOx-DLC coatings is strongly affected by the concentration of TTIP (titanium (IV) isopropoxide) precursor in working atmosphere. The proposed technology allows to obtain TiOx-DLC coatings with Ti concentration up to 10 at.%. Higher concentrations of Ti in the coating (5 and 10 at.%) result in twice the concentration of oxygen. As the results of the investigation it was noticed, stable TiOx-DLC coatings showing acceptable hardness and residual stress, as well as good optical properties contain up to 1.5 at.% of Ti and can be deposited at 400 V of the negative self-bias using 0.05 of TTIP partial pressure ratio.
- Record ID
- WUTd09ee4f958004f4ab600932ab81669a2
- Author
- Journal series
- Thin Solid Films, ISSN 0040-6090
- Issue year
- 2020
- Vol
- 693
- No
- 1 January
- Pages
- 1-7
- Publication size in sheets
- 0.50
- Article number
- 137697
- ASJC Classification
- ; ; ; ;
- DOI
- DOI:10.1016/j.tsf.2019.137697 Opening in a new tab
- URL
- https://www.sciencedirect.com/science/article/pii/S0040609019307242 Opening in a new tab
- Language
- (en) English
- Score (nominal)
- 70
- Score source
- journalList
- Score
- = 70.0, 15-05-2022, ArticleFromJournal
- Publication indicators
- = 2; = 3; = 1; : 2017 = 0.864; : 2020 (2 years) = 2.183 - 2020 (5 years) =2.006
- Citation count
- 6
Share
- Uniform Resource Identifier
- https://repo.pw.edu.pl/info/article/WUTd09ee4f958004f4ab600932ab81669a2/
- URN
urn:pw-repo:WUTd09ee4f958004f4ab600932ab81669a2
* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or PerishOpening in a new tab system.