Comparison of Al2O3 nano-overlays deposited with magnetron sputtering and atomic layer deposition on optical fibers for sensing purposes

Mateusz Jakub Śmietana , T. Drążewski , Piotr Firek , P. Mikulic , Wojtek J. Bock

Abstract

In this work we compare effects of thin (<300 nm) aluminum oxide (Al2O3) deposition using advanced physical (Magnetron Sputtering - MS) and chemical (Atomic Layer Deposition – ALD) vapor deposition methods on optical fibers. We investigate an influence of the process parameters on optical properties of the nano-films deposited with MS. In order to investigate the properties of the films directly on the fibers, we induced long-period fiber grating (LPG) in the fiber prior the deposition. Thanks to LPG sensitivity to thickness and optical properties of the overlays deposited on the fiber, we are able to monitor Al2O3 nano-overlay properties. Moreover, we investigate an influence of the overlays deposited with both the methods on LPG-based refractive index (RI) sensing. We show and discuss tuning of the RI sensitivity by proper selection of both thickness and optical properties of the Al2O3 nano-overlays. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Author Mateusz Jakub Śmietana (FEIT / MO)
Mateusz Jakub Śmietana,,
- The Institute of Microelectronics and Optoelectronics
, T. Drążewski - [Warsaw University of Technology (PW)]
T. Drążewski,,
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- Politechnika Warszawska
, Piotr Firek (FEIT / MO)
Piotr Firek,,
- The Institute of Microelectronics and Optoelectronics
, P. Mikulic - [Universite du Quebec en Outaouais]
P. Mikulic,,
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, Wojtek J. Bock - [Universite du Quebec en Outaouais]
Wojtek J. Bock,,
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Pages1-8
Book Friend James, Hoe Tan H. (eds.): Micro/Nano Materials, Devices, and Systems, Proceedings of SPIE: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments, vol. 8923, 2013, SPIE PO Box 10, Bellingham WA 98227-0010, USA , SPIE, ISBN 9780819498144, 988 p., DOI:10.1117/12.2053914
DOIDOI:10.1117/12.2033792
URL http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1788900
Languageen angielski
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Comparison of Al2O3 nano-overlays deposited with Magnetron.pdf 733.57 KB
Score (nominal)0
Publication indicators Scopus Citations = 2; WoS Citations = 0; GS Citations = 2.0
Citation count*2 (2020-08-30)
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