Comparison of Al2O3 nano-overlays deposited with magnetron sputtering and atomic layer deposition on optical fibers for sensing purposes
Mateusz Jakub Śmietana , T. Drążewski , Piotr Firek , P. Mikulic , Wojtek J. Bock
AbstractIn this work we compare effects of thin (<300 nm) aluminum oxide (Al2O3) deposition using advanced physical (Magnetron Sputtering - MS) and chemical (Atomic Layer Deposition – ALD) vapor deposition methods on optical fibers. We investigate an influence of the process parameters on optical properties of the nano-films deposited with MS. In order to investigate the properties of the films directly on the fibers, we induced long-period fiber grating (LPG) in the fiber prior the deposition. Thanks to LPG sensitivity to thickness and optical properties of the overlays deposited on the fiber, we are able to monitor Al2O3 nano-overlay properties. Moreover, we investigate an influence of the overlays deposited with both the methods on LPG-based refractive index (RI) sensing. We show and discuss tuning of the RI sensitivity by proper selection of both thickness and optical properties of the Al2O3 nano-overlays. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
|Book||Friend James, Hoe Tan H. (eds.): Micro/Nano Materials, Devices, and Systems, Proceedings of SPIE: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments, vol. 8923, 2013, SPIE PO Box 10, Bellingham WA 98227-0010, USA , SPIE, ISBN 9780819498144, 988 p., DOI:10.1117/12.2053914|
|Publication indicators||= 2; = 0; = 2.0|
|Citation count*||2 (2020-08-30)|
* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.