Optimization of Ultra-Thin Pulsed-DC Magnetron Sputtered Aluminum Films for the Technology of Hyperbolic Metamaterials

Robert Paweł Mroczyński , Daniel Iwanicki , Bartosz Fetliński , Monika Ożga , Michał Świniarski , Arkadiusz P. Gertych , Mariusz Zdrojek , Marek Godlewski


The future applications of hyperbolic metamaterials demand stacks of materials with alternative ultra-thin conductive/dielectric films with good homogeneity of the thickness and reduced roughness level. In this work, the technology of pulsed-DC magnetron sputtering of aluminum was optimized using the Taguchi method in order to fabricate Al films with improved roughness level. The performed structural characterization proved the smaller Al domains and better homogeneity of the surface. The optimized process was used to fabricate a multilayer structure of Al/HfOx as the metamaterial media. The fabricated structures were optically characterized in the UV/VIS range. The presented findings demonstrated the tunability effect of the effective reflectance of the examined stacks. The presented results are promising for the future application of multilayer structures in novel photonic devices based on hyperbolic metamaterials.
Author Robert Paweł Mroczyński (FEIT / MO)
Robert Paweł Mroczyński,,
- The Institute of Microelectronics and Optoelectronics
, Daniel Iwanicki (FEIT / MO)
Daniel Iwanicki,,
- The Institute of Microelectronics and Optoelectronics
, Bartosz Fetliński (FEIT / MO)
Bartosz Fetliński,,
- The Institute of Microelectronics and Optoelectronics
, Monika Ożga
Monika Ożga,,
, Michał Świniarski (FP / SRD)
Michał Świniarski,,
- Structural Research Division
, Arkadiusz P. Gertych (FP / SRD)
Arkadiusz P. Gertych,,
- Structural Research Division
, Mariusz Zdrojek (FP / SRD)
Mariusz Zdrojek,,
- Structural Research Division
, Marek Godlewski
Marek Godlewski,,
Journal seriesCrystals, ISSN 2073-4352
Issue year2020
Article number384
ASJC Classification1500 General Chemical Engineering; 1604 Inorganic Chemistry; 2500 General Materials Science; 3104 Condensed Matter Physics
URL https://www.mdpi.com/2073-4352/10/5/384
Project[TECHMATSTRATEG1/347012/3/NCBR/2017] Tunable hyperbolic metamaterials for the new generation of photonic devices. Project leader: Malinowski Michał, , Phone: (+48) 22 234 7777, start date 01-12-2017, planned end date 30-11-2020, IMiO/2017/Techamat/1, Implemented
Projects financed by NCRD [Projekty finansowane przez NCBiR (NCBR)]
Languageen angielski
Score (nominal)70
Score sourcejournalList
ScoreMinisterial score = 70.0, 13-08-2020, ArticleFromJournal
Publication indicators Scopus Citations = 0; GS Citations = 1.0; Scopus SNIP (Source Normalised Impact per Paper): 2018 = 0.695; WoS Impact Factor: 2018 = 2.061 (2) - 2018=2.086 (5)
Citation count*1 (2020-09-11)
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