Control of tribological properties of ultrathin polysilicon films

Marcin Michałowski , Zygmunt Rymuza , Voicu Rodica , Obreja Cosmin , Baracu Angela , Muller Raluca

Abstract

The selection of the proper materials for the fabrication of the Micro Electro Mechanical Systems (MEMS) is a very important issue in the MEMS research. The materials should be adequate for the fabrication process as well as they have to demonstrate in particular good adhesive (to avoid stiction between contacting/sliding components) and frictional/tribological properties. We fabricated ultrathin (50 nm thick) polysilicon films on single crystal silicon wafers at various deposition process conditions and observed the effect of the process parameters on surface topography and adhesive as well as frictional properties of the produced films. The Atomic Force Microscope (AFM) was used in these studies equipped with special cantilevers. We identified interesting correlations between the process parameters and adhesive/frictional properties of the studied films which enable to optimize the process to decrease adhesion (stiction) and friction between sliding components of MEMS devices.
Author Marcin Michałowski IMiF
Marcin Michałowski,,
- The Institute of Micromechanics and Photonics
, Zygmunt Rymuza IMiF
Zygmunt Rymuza,,
- The Institute of Micromechanics and Photonics
, Voicu Rodica - [National Institute for Research and Development in Microtechnologies -IMT Bucharest]
Voicu Rodica,,
-
- National Institute for Research and Development in Microtechnologies -IMT Bucharest
, Obreja Cosmin - [National Institute for Research and Development in Microtechnologies -IMT Bucharest]
Obreja Cosmin,,
-
- National Institute for Research and Development in Microtechnologies -IMT Bucharest
, Baracu Angela - [National Institute for Research and Development in Microtechnologies (IMT)University Politehnica of Bucharest]
Baracu Angela,,
-
- National Institute for Research and Development in Microtechnologies (IMT)University Politehnica of Bucharest
, Muller Raluca - [National Institute for Research and Development in Microtechnologies -IMT Bucharest]
Muller Raluca,,
-
- National Institute for Research and Development in Microtechnologies -IMT Bucharest
Pages1-4
Publication size in sheets0.5
Book Benoit Charlot, (eds.): 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2016, IEEE, ISBN 978-1-5090-1457-6
Keywords in English polysilicon films, MEMS, stiction, friction
DOIDOI:10.1109/DTIP.2016.7514875
URL http://ieeexplore.ieee.org/document/7514875/?reload=true
Languageen angielski
Score (nominal)15
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