Sensing properties of micro-cavity in-line Mach-Zehnder interferometer enhanced by reactive ion etching

Monika Janik , Marcin Koba , Anna Celebańska , Wojtek J. Bock , Mateusz Jakub Śmietana


[INVITED] In this work, we discuss an application of reactive ion etching (RIE) for enhancing the sensing properties of a micro-cavity in-line Mach-Zehnder interferometer (µIMZI). The µIMZI was fabricated using femtosecond laser micromachining in a standard single-mode fiber as a circular hole with a diameter of 54 µm. Next, the structures underwent two kinds of RIE using as reactive gases: sulfur hexafluoride (SF6) and oxygen (O2) mixtures (SF6/O2) or O2 itself. When RIE with SF6/O2 was applied, it allowed for an efficient and well-controlled etching of the fabricated structure at nanometers level observed as an increase in spectral depths of the minima in the µIMZI transmission spectrum. A similar RIE process with O2 alone was ineffective. The well-defined minima obtained with the SF6/O2 RIE significantly improved the resolution of measurements made with the µIMZI. The effect was demonstrated for high-resolution refractive index (RI) measurements of liquids in the cavity. The result of the RIE process was to clean the micro-cavity bottom, increase its depth, and smooth its sidewalls. As an additional effect, the wettability of the micro-cavity surface was improved, making the RI measurements faster and more repeatable. Moreover, we demonstrated that RIE with SF6/O2 results in more stable wettability improvement than when O2 is applied as a reactive gas.
Author Monika Janik - [Universite du Quebec en Outaouais]
Monika Janik,,
, Marcin Koba
Marcin Koba,,
, Anna Celebańska - [Universite du Quebec en Outaouais]
Anna Celebańska,,
, Wojtek J. Bock - [Universite du Quebec en Outaouais]
Wojtek J. Bock,,
, Mateusz Jakub Śmietana (FEIT / MO)
Mateusz Jakub Śmietana,,
- The Institute of Microelectronics and Optoelectronics
Journal seriesOptics and Laser Technology, ISSN 0030-3992
Issue year2018
NoJuly 2018
Publication size in sheets0.5
ASJC Classification2208 Electrical and Electronic Engineering; 3107 Atomic and Molecular Physics, and Optics; 2504 Electronic, Optical and Magnetic Materials
Projectx. Project leader: Śmietana Mateusz Jakub, , Phone: (22) 234 63 64, start date 25-02-2015, planned end date 24-02-2018, IMIO/2015/NCN/1, Implemented
WEiTI Projects financed by NSC [Projekty finansowane przez NCN]
Languageen angielski
Score (nominal)30
Score sourcejournalList
ScoreMinisterial score = 30.0, 22-06-2020, ArticleFromJournal
Publication indicators Scopus Citations = 4; WoS Citations = 1; GS Citations = 3.0; Scopus SNIP (Source Normalised Impact per Paper): 2017 = 1.434; WoS Impact Factor: 2018 = 3.319 (2) - 2018=2.643 (5)
Citation count*4 (2020-06-03)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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