Phase composition of copper nitride coatings examined by the use of X-ray diffraction and Raman spectroscopy
Katarzyna Nowakowska-Langier , Rafał Chodun , R. Minikayev , Sebastian Okrasa , Grzegorz W. Strzelecki , B. Wicher , Krzysztof Zdunek
AbstractThe Cu-N layers were deposited on non-heated substrates by means of the pulsed magnetron sputtering (PMS) method. Conducted studies were focused on the structural properties characterization and were performed by using Raman spectroscopy and X-ray diffraction techniques. Based on these studies, especially taking into account the Raman band shift as a control parameter, classification of the Cu-N coatings in terms of their chemical composition and phase structure (stoichiometry, supersaturation) were performed. Obtained results point to the conclusion that polycrystalline structure of Cu-N layers depends on the Cu-content. When the Cu-content increases, recorded lattice constant changes from 0.3817 nm to 0.388 nm. This phenomenon is accompanied by deviation from stoichiometry of the Cu3N phase. At the same time, Raman band shift from 635 cm−1 to 610 cm−1 is observed. Thus, obtained results point to the conclusion that the Raman spectroscopy technique allows to determine the relation between deviation of the system from the phase equilibrium in the function of the band shift.
|Journal series||Journal of Molecular Structure, ISSN 0022-2860, (A 20 pkt)|
|Publication size in sheets||0.5|
|Conference||XIVth International Conference on Molecular Spectroscopy (ICMS 2017), 03-09-2017 - 07-09-2017, Białka Tatrzańska, Polska|
|Keywords in English||Pulsed magnetron sputtering; Copper nitride layers; Raman spectroscopy; X-ray diffraction|
|ASJC Classification||; ; ;|
|Score|| = 20.0, 11-03-2019, ArticleFromJournalAndMatConf|
= 20.0, 11-03-2019, ArticleFromJournalAndMatConf
|Publication indicators||: 2016 = 0.751; : 2017 = 2.011 (2) - 2017=1.784 (5)|
|Citation count*||3 (2019-04-17)|
* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.