Phase composition of copper nitride coatings examined by the use of X-ray diffraction and Raman spectroscopy

Katarzyna Nowakowska-Langier , Rafał Chodun , R. Minikayev , Sebastian Okrasa , Grzegorz W. Strzelecki , B. Wicher , Krzysztof Zdunek

Abstract

The Cu-N layers were deposited on non-heated substrates by means of the pulsed magnetron sputtering (PMS) method. Conducted studies were focused on the structural properties characterization and were performed by using Raman spectroscopy and X-ray diffraction techniques. Based on these studies, especially taking into account the Raman band shift as a control parameter, classification of the Cu-N coatings in terms of their chemical composition and phase structure (stoichiometry, supersaturation) were performed. Obtained results point to the conclusion that polycrystalline structure of Cu-N layers depends on the Cu-content. When the Cu-content increases, recorded lattice constant changes from 0.3817 nm to 0.388 nm. This phenomenon is accompanied by deviation from stoichiometry of the Cu3N phase. At the same time, Raman band shift from 635 cm−1 to 610 cm−1 is observed. Thus, obtained results point to the conclusion that the Raman spectroscopy technique allows to determine the relation between deviation of the system from the phase equilibrium in the function of the band shift.
Author Katarzyna Nowakowska-Langier (FMSE)
Katarzyna Nowakowska-Langier,,
- Faculty of Materials Science and Engineering
, Rafał Chodun (FMSE / DSE)
Rafał Chodun,,
- Division of Surface Engineering
, R. Minikayev
R. Minikayev,,
-
, Sebastian Okrasa (FMSE / DSE)
Sebastian Okrasa,,
- Division of Surface Engineering
, Grzegorz W. Strzelecki
Grzegorz W. Strzelecki,,
-
, B. Wicher
B. Wicher,,
-
, Krzysztof Zdunek (FMSE / DSE)
Krzysztof Zdunek,,
- Division of Surface Engineering
Journal seriesJournal of Molecular Structure, ISSN 0022-2860, (A 20 pkt)
Issue year2018
Vol1165
Pages79-83
Publication size in sheets0.5
ConferenceXIVth International Conference on Molecular Spectroscopy (ICMS 2017), 03-09-2017 - 07-09-2017, Białka Tatrzańska, Polska
Keywords in EnglishPulsed magnetron sputtering; Copper nitride layers; Raman spectroscopy; X-ray diffraction
DOIDOI:10.1016/j.molstruc.2018.03.107
URL https://www.sciencedirect.com/science/article/pii/S0022286018304046
Languageen angielski
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Phase composition of copper nitride coatings examined by the use of X-ray diffraction and Raman spectroscopy.pdf 1.4 MB
Score (nominal)20
ScoreMinisterial score = 20.0, 23-04-2018, ArticleFromJournal
Ministerial score (2013-2016) = 20.0, 23-04-2018, ArticleFromJournal
Publication indicators WoS Impact Factor: 2016 = 1.753 (2) - 2016=1.561 (5)
Citation count*1 (2018-10-28)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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