Thermal properties of modified carbon films
Jerzy Kalenik , Konrad Kiełbasiński , Piotr Firek , Elżbieta Czerwosz , Jan Szmidt
AbstractPurpose – The purpose of this paper is to present thermal properties of palladium-carbon films prepared by physical vapour deposition (PVD)/chemical vapour deposition (CVD) methods. Design/methodology/approach – Thin palladium-carbon films were prepared at Tele- and Radioresearch Institute. Test structures containing palladium-carbon films and titanium electrodes were made. Temperature-resistance characteristics were measured. Findings – The results show strong temperature dependence of modified carbon film resistance. The dependence is stable, and so modified carbon films can be applied for various electronic applications. Originality/value – The paper presents thermal properties of thin palladium-carbon prepared by original PVD/CVD method at Tele- and Radioresearch Institute.
|Journal series||Circuit World, ISSN 0305-6120|
|Publication size in sheets||0.5|
|Keywords in English||Carbon films deposition, Hydrogen sensors, Palladium-carbon films|
|Score|| = 15.0, 27-03-2017, ArticleFromJournal|
= 20.0, 27-03-2017, ArticleFromJournal
|Publication indicators||: 2016 = 0.727 (2) - 2016=0.916 (5)|
|Acknowledgement||This project is co-ﬁnanced by the European Regional Development Fund within the Innovative Economy Operational Programme 2007-2013 (title of the project “Development of technology for a new generation of the hydrogen and hydrogen compounds sensor for applications in above normative conditions” No UDA-POIG.01.03.01-14-071/08-09.|
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