Thermal properties of modified carbon films

Jerzy Kalenik , Konrad Kiełbasiński , Piotr Firek , Elżbieta Czerwosz , Jan Szmidt


Purpose – The purpose of this paper is to present thermal properties of palladium-carbon films prepared by physical vapour deposition (PVD)/chemical vapour deposition (CVD) methods. Design/methodology/approach – Thin palladium-carbon films were prepared at Tele- and Radioresearch Institute. Test structures containing palladium-carbon films and titanium electrodes were made. Temperature-resistance characteristics were measured. Findings – The results show strong temperature dependence of modified carbon film resistance. The dependence is stable, and so modified carbon films can be applied for various electronic applications. Originality/value – The paper presents thermal properties of thin palladium-carbon prepared by original PVD/CVD method at Tele- and Radioresearch Institute.
Author Jerzy Kalenik (FEIT / MO)
Jerzy Kalenik,,
- The Institute of Microelectronics and Optoelectronics
, Konrad Kiełbasiński - [Institute of Electronic Materials Technology (ITME)]
Konrad Kiełbasiński,,
- Instytut Technologii Materiałów Elektronicznych
, Piotr Firek (FEIT / MO)
Piotr Firek,,
- The Institute of Microelectronics and Optoelectronics
, Elżbieta Czerwosz - [Instytut Tele-i Radiotechniczny, Warszawa]
Elżbieta Czerwosz,,
, Jan Szmidt (FEIT / MO)
Jan Szmidt,,
- The Institute of Microelectronics and Optoelectronics
Journal seriesCircuit World, ISSN 0305-6120
Issue year2016
Publication size in sheets0.5
Keywords in EnglishCarbon films deposition, Hydrogen sensors, Palladium-carbon films
ASJC Classification2208 Electrical and Electronic Engineering; 2209 Industrial and Manufacturing Engineering
Languageen angielski
Score (nominal)20
Score sourcejournalList
ScoreMinisterial score = 15.0, 09-03-2020, ArticleFromJournal
Ministerial score (2013-2016) = 20.0, 09-03-2020, ArticleFromJournal
Publication indicators Scopus Citations = 0; WoS Citations = 0; Scopus SNIP (Source Normalised Impact per Paper): 2016 = 0.671; WoS Impact Factor: 2016 = 0.727 (2) - 2016=0.916 (5)
Citation count*
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AcknowledgementThis project is co-financed by the European Regional Development Fund within the Innovative Economy Operational Programme 2007-2013 (title of the project “Development of technology for a new generation of the hydrogen and hydrogen compounds sensor for applications in above normative conditions” No UDA-POIG.01.03.01-14-071/08-09.
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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