Thermal properties of modified carbon films

Jerzy Kalenik , Konrad Kiełbasiński , Piotr Firek , Elżbieta Czerwosz , Jan Szmidt

Abstract

Purpose – The purpose of this paper is to present thermal properties of palladium-carbon films prepared by physical vapour deposition (PVD)/chemical vapour deposition (CVD) methods. Design/methodology/approach – Thin palladium-carbon films were prepared at Tele- and Radioresearch Institute. Test structures containing palladium-carbon films and titanium electrodes were made. Temperature-resistance characteristics were measured. Findings – The results show strong temperature dependence of modified carbon film resistance. The dependence is stable, and so modified carbon films can be applied for various electronic applications. Originality/value – The paper presents thermal properties of thin palladium-carbon prepared by original PVD/CVD method at Tele- and Radioresearch Institute.
Author Jerzy Kalenik IMiO
Jerzy Kalenik,,
- The Institute of Microelectronics and Optoelectronics
, Konrad Kiełbasiński - [Institute of Electronic Materials Technology (ITME)]
Konrad Kiełbasiński,,
-
- Instytut Technologii Materiałów Elektronicznych
, Piotr Firek IMiO
Piotr Firek,,
- The Institute of Microelectronics and Optoelectronics
, Elżbieta Czerwosz
Elżbieta Czerwosz,,
-
, Jan Szmidt IMiO
Jan Szmidt,,
- The Institute of Microelectronics and Optoelectronics
Journal seriesCircuit World, ISSN 0305-6120
Issue year2016
Vol42
No1
Pages37-41
Publication size in sheets0.5
Keywords in EnglishCarbon films deposition, Hydrogen sensors, Palladium-carbon films
DOIDOI:10.1108/CW-10-2015-0055
URL http://www.emeraldinsight.com/doi/full/10.1108/CW-10-2015-0055
Languageen angielski
Score (nominal)20
ScoreMinisterial score = 15.0, 27-03-2017, ArticleFromJournal
Ministerial score (2013-2016) = 20.0, 27-03-2017, ArticleFromJournal
Publication indicators WoS Impact Factor: 2016 = 0.727 (2) - 2016=0.916 (5)
Citation count*0
Additional fields
AcknowledgementThis project is co-financed by the European Regional Development Fund within the Innovative Economy Operational Programme 2007-2013 (title of the project “Development of technology for a new generation of the hydrogen and hydrogen compounds sensor for applications in above normative conditions” No UDA-POIG.01.03.01-14-071/08-09.
Cite
Share Share



* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
Back