Effect of thermal annealing on sensing properties of optical fiber sensors coated with indium tin oxide nano-overlays

Bartosz Michalak , Petr Sezemsky , Vitezslav Stranak , Mateusz Jakub Śmietana


In this work we discuss an effect of thermal annealing on optical and electrical properties of indium tin oxide (ITO) thin films deposited on a short section of the multimode polymer-clad silica (PCS) optical fiber core. ITO films were deposited using a different configuration of high-power impulse magnetron sputtering (HiPIMS) and radio frequency magnetron sputtering (RF MS) cathodes. Due to tuned ITO film thickness it was possible to observe for these structures a lossy-mode resonance (LMR) and trace changes in the properties of films. Electrical resistance of the ITO overlays was also measured. Both optical and electrical measurements were repeated after annealing at 200°C in a tube furnace and nitrogen atmosphere. The measurements have shown that thermal annealing changes an optical response to the external refractive index (RI) of the fiber sensor and also changes the ITO layer resistivity. As an effect of thermal annealing, we observed a shift of the LMR towards longer wavelengths. In addition, as a result of annealing, the resistivity of the ITO layer was reduced.
Author Bartosz Michalak (CAMT)
Bartosz Michalak,,
- The Centre for Advanced Materials and Technologies
, Petr Sezemsky - [Jihoceská Univerzita v Ceských Budejovicích]
Petr Sezemsky,,
, Vitezslav Stranak - [Jihoceská Univerzita v Ceských Budejovicích]
Vitezslav Stranak,,
, Mateusz Jakub Śmietana (FEIT / MO)
Mateusz Jakub Śmietana,,
- The Institute of Microelectronics and Optoelectronics
Journal seriesPhotonics Letters of Poland, ISSN 2080-2242
Issue year2020
ASJC Classification2504 Electronic, Optical and Magnetic Materials
URL http://www.photonics.pl/PLP/index.php/letters/article/view/12-20
Languageen angielski
Score (nominal)40
Score sourcejournalList
ScoreMinisterial score = 40.0, 14-09-2020, ArticleFromJournal
Publication indicators Scopus Citations = 0; WoS Citations = 0; Scopus SNIP (Source Normalised Impact per Paper): 2018 = 0.348
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