Characterization of sp 3 bond content of carbon films deposited by high power gas injection magnetron sputtering method by UV and VIS Raman spectroscopy

Krzysztof Zdunek , Rafał Chodun , B. Wicher , Katarzyna Nowakowska-Langier , Sebastian Okrasa

Abstract

This paper presents the results of investigations of carbon films deposited by a modified version of the magnetron sputtering method – HiPGIMS (High Power Gas Injection Magnetron Sputtering). In this experiment, the magnetron system with inversely polarized electrodes (sputtered cathode at ground potential and positively biased, spatially separated anode) was used. This arrangement allowed us to conduct the experiment using voltages ranging from 1 to 2 kV and a power supply system equipped with 25/50 μF capacitor battery. Carbon films were investigated by VIS/UV Raman spectroscopy. Sp3/sp2 bonding ratio was evaluated basing the elementary components of registered spectra. Our investigation showed that sp3 bond content increases with discharge power but up to specific value only. In extreme conditions of generating plasma impulses, we detected a reversed relation of the sp3/sp2 ratio. In our opinion, a energy of plasma pulse favors nucleation of a sp3 phase because of a relatively higher ionization state but in extreme cases the influence of energy is reversed.
Author Krzysztof Zdunek (FMSE / DSE)
Krzysztof Zdunek,,
- Division of Surface Engineering
, Rafał Chodun (FMSE / DSE)
Rafał Chodun,,
- Division of Surface Engineering
, B. Wicher
B. Wicher,,
-
, Katarzyna Nowakowska-Langier (FMSE)
Katarzyna Nowakowska-Langier,,
- Faculty of Materials Science and Engineering
, Sebastian Okrasa (FMSE / DSE)
Sebastian Okrasa,,
- Division of Surface Engineering
Journal seriesSpectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy, ISSN 1386-1425, (A 30 pkt)
Issue year2018
Vol194
Pages136-140
Publication size in sheets0.5
ConferenceXIVth International Conference on Molecular Spectroscopy (ICMS 2017), 03-09-2017 - 07-09-2017, Białka Tatrzańska, Polska
Keywords in EnglishDLC films; Raman spectroscopy; UV Raman spectroscopy; HiPIMS; HiPGIMS; Magnetron sputtering
DOIDOI:10.1016/j.saa.2018.01.015
URL https://www.sciencedirect.com/science/article/pii/S1386142518300210
Languageen angielski
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Characterization of sp3 bond content of carbon films deposited by high.pdf 1.5 MB
Score (nominal)30
ScoreMinisterial score = 30.0, 23-04-2018, ArticleFromJournal
Ministerial score (2013-2016) = 30.0, 23-04-2018, ArticleFromJournal
Publication indicators WoS Impact Factor: 2016 = 2.536 (2) - 2016=2.346 (5)
Citation count*1 (2018-11-13)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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