Effect of interface traps parameters on admittance characteristics of the MIS (metal-insulator-semiconductor) tunnel structures

Jakub Maciej Jasiński , Andrzej Igor Mazurak , Bogdan Majkusiak


Interface traps density (Nit) and gate insulator thickness (tox) impact on MIS tunnel structure electrical characteristics is discussed in respect to bias voltage range corresponding to inversion in the semiconductor substrate region. Effect of Nit and tox on equilibrium and non-equilibrium operation regime of the device is presented. Different models of the small-signal response of interface traps are proposed and discussed in respect to several phenomena related to the traps charging and discharging processes. Presented analysis was performed for the MIS structures with the gate dielectric made of silicon dioxide (SiO2) and hafnium oxide (HfOx). The obtained results proved that the surface density of interface traps (Nit) and the insulator thickness (tox) have correlated impact on the transition between equilibrium and non-equilibrium operation of the MIS tunnel structures.
Author Jakub Maciej Jasiński (FEIT / MO)
Jakub Maciej Jasiński,,
- The Institute of Microelectronics and Optoelectronics
, Andrzej Igor Mazurak (FEIT / MO)
Andrzej Igor Mazurak,,
- The Institute of Microelectronics and Optoelectronics
, Bogdan Majkusiak (FEIT / MO)
Bogdan Majkusiak,,
- The Institute of Microelectronics and Optoelectronics
Book Swatowska Barbara, Maziarz Wojciech, Pisarkiewicz Tadeusz, Kucewicz Wojciech (eds.): Proceedings of SPIE Electron Technology Conference 2016, vol. 1, no. 10175, 2016, P.O.Box 10, Bellingham, Washington 98227-0010 USA, SPIE, ISBN 9781510608436, 354 p., DOI:10.1117/12.2270351
Keywords in EnglishInterfaces; Metals; Semiconductors; Silica; Semiconductor materials; Hafnium; Oxides
URL http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2595262
Languageen angielski
Score (nominal)15
Score sourceconferenceIndex
ScoreMinisterial score = 15.0, 01-02-2020, BookChapterMatConfByIndicator
Ministerial score (2013-2016) = 15.0, 01-02-2020, BookChapterMatConfByIndicator
Publication indicators Scopus Citations = 0; WoS Citations = 0
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Additional fields
Numer pracy1017508
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