Multi-incidence digital holographic microscopy with high axial resolution and enlarge measurement range

Juan Martinez-Carranza , Marta Mikuła-Zdańkowska , Michał Ziemczonok , Tomasz Kozacki

Abstract

In this work, multi-incident digital holographic profilometry for microscale measurements is presented. This technique assembles the set of object fields from captured holograms for generation of the longitudinal scanning function (LSF). Numerical propagation is used for refocusing, and thus, the LSF can be determined at any given plane along the optical axis. The LSF takes maximum value for in focus object points, which are used to obtain full-field height distribution of the sample. This principle is the base of proposed measurement technique. Three capturing holograms strategies, which give control over the shape of the LSF, unambiguous measurement range, axial resolution, and noise immunity, are discussed. The conclusions of this work are supported by numerical and experimental results.
Author Juan Martinez-Carranza (FM / IMPh)
Juan Martinez-Carranza,,
- The Institute of Micromechanics and Photonics
, Marta Mikuła-Zdańkowska (FM / IMPh)
Marta Mikuła-Zdańkowska,,
- The Institute of Micromechanics and Photonics
, Michał Ziemczonok (FM / IMPh)
Michał Ziemczonok,,
- The Institute of Micromechanics and Photonics
, Tomasz Kozacki (FM / IMPh)
Tomasz Kozacki,,
- The Institute of Micromechanics and Photonics
Journal seriesOptics Express, ISSN 1094-4087
Issue year2020
Vol28
No6
Pages8185-8199
Publication size in sheets0.7
Keywords in Englishholography, multi-incident digital holographic profilometry, height distribution, unambiguous measurement range
ASJC Classification3107 Atomic and Molecular Physics, and Optics
DOIDOI:10.1364/OE.385743
URL https://www.osapublishing.org/oe/abstract.cfm?uri=oe-28-6-8185
Languageen angielski
Score (nominal)140
Score sourcejournalList
ScoreMinisterial score = 140.0, 08-06-2020, ArticleFromJournal
Publication indicators Scopus Citations = 0; Scopus SNIP (Source Normalised Impact per Paper): 2017 = 1.567; WoS Impact Factor: 2018 = 3.561 (2) - 2018=3.531 (5)
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