Multi-incidence digital holographic microscopy with high axial resolution and enlarge measurement range
Juan Martinez-Carranza , Marta Mikuła-Zdańkowska , Michał Ziemczonok , Tomasz Kozacki
AbstractIn this work, multi-incident digital holographic profilometry for microscale measurements is presented. This technique assembles the set of object fields from captured holograms for generation of the longitudinal scanning function (LSF). Numerical propagation is used for refocusing, and thus, the LSF can be determined at any given plane along the optical axis. The LSF takes maximum value for in focus object points, which are used to obtain full-field height distribution of the sample. This principle is the base of proposed measurement technique. Three capturing holograms strategies, which give control over the shape of the LSF, unambiguous measurement range, axial resolution, and noise immunity, are discussed. The conclusions of this work are supported by numerical and experimental results.
|Journal series||Optics Express, ISSN 1094-4087|
|Publication size in sheets||0.7|
|Keywords in English||holography, multi-incident digital holographic profilometry, height distribution, unambiguous measurement range|
|Score||= 140.0, 08-06-2020, ArticleFromJournal|
|Publication indicators||= 0; : 2017 = 1.567; : 2018 = 3.561 (2) - 2018=3.531 (5)|
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