Contribution to scaling of Vertical-Slit Field-Effect Transistor (VeSFET)

Andrzej Pfitzner , Beata Kowalska


A Junction-less twin-gate Vertical-Slit Field-Effect Transistor (VeSFET) is the elementary component of a new 3D VeSTIC technology [1]. Feasibility studies conducted until now indicate that VeSTIC architecture has the potential to overcome many barriers of ICs scaling in the deep-submicron era. As it was shown earlier, electrical properties of VeSFETs seems to be very attractive, but simulations [5] indicate different correlations between electrical and structure parameters in comparison with those of MOSFETs which operate in inversion mode. In this paper the exploration of the VeSFET parameters space has been developed and preliminary scaling recommendations are formulated.
Author Andrzej Pfitzner (FEIT / MO)
Andrzej Pfitzner,,
- The Institute of Microelectronics and Optoelectronics
, Beata Kowalska (FEIT / MO)
Beata Kowalska,,
- The Institute of Microelectronics and Optoelectronics
Publication size in sheets0.5
Book Napieralski Andrzej (eds.): Proceedings of 23rd International Conference Mixed Design of Integrated Circuits and Systems MIXDES 2016, vol. CFP16MIX-CDR, 2016, Wólczańska 221/223, 90-924 Łódź, Poland, Lodz University of Technology, Department of Microelectronics and Computer Science, ISBN 978-83-63578-08-4, 538 p.
Keywords in EnglishVeSFET; VeSTIC technology; Vertical-Slit Field-Effect Transistor; junction-less transistor; scaling; twin-gate transistor
Project[PBS1/A3/4/2012_177244] VESTIC – a new manufacturing technology for silicon-based monolithic integrated circuits. Project leader: Kuźmicz Wiesław, , Phone: (+48) 22 234 7146, application date 16-03-2012, start date 01-01-2012, planned end date 30-11-2015, end date 30-09-2017, IMiO/2012/PBS/3, Completed
WEiTI Projects financed by NCRD [Projekty finansowane przez NCBiR (NCBR)]
Languageen angielski
Score (nominal)15
Score sourceconferenceIndex
ScoreMinisterial score = 15.0, 01-02-2020, BookChapterMatConfByIndicator
Ministerial score (2013-2016) = 15.0, 01-02-2020, BookChapterMatConfByIndicator
Publication indicators Scopus Citations = 2; WoS Citations = 0; GS Citations = 2.0
Citation count*2 (2020-09-14)
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