OES studies of plasmoids distribution during the coating deposition with the use of the Impulse Plasma Deposition method controlled by the gas injection

Katarzyna Nowakowska-Langier , Rafał Chodun , Krzysztof Zdunek , Sebastian Okrasa , Roch Kwiatkowski , Karol Malinowski , Elżbieta Składnik-Sadowska , Marek Sadowski

Abstract

The article presents the results concerning the OES characterization of plasmoids generated by the Impulse Plasma Deposition method modified by the use of gas injection (Gas Controlled IPD). Both of the electrodes of the coaxial accelerator: the tube (cathode) and the rod (anode–the source of the vapors) are permanently connected with the capacitors charged to the high voltage of few kV value. During the coatings deposition both the electro-eroded vapors of the anode material (Ti) and the working gas (N2) form the plasmoids which are accelerated by the Ampere force in the coaxial accelerator and ejected to the vacuum chamber in the direction of non-heated substrates forming there the TiN coating. Periodic gas injections which make pressure fluctuations in the accelerator space in the range of critical values and cause the discharge to initiate or vanish accordingly with the chosen frequency. The promising practical effects of the use of gas injection for controlling the plasma processes during the coatings deposition by the GCIPD method was previously proved. On the basis of the present studies one can state that the GCIPD′ plasmoids containing multiple ions both of metallic as well as gas plasmoids constituents are more energetic as compared to the IPD case. Contrary to the IPD during the GCIPD the titanium fraction of the plasmoids structure overtakes the nitrogen one which seems to be important to the coating growth mechanism.
Author Katarzyna Nowakowska-Langier - Narodowe Centrum Badań Jądrowych NCBJ
Katarzyna Nowakowska-Langier,,
-
, Rafał Chodun ZIP
Rafał Chodun,,
- Division of Surface Engineering
, Krzysztof Zdunek ZIP
Krzysztof Zdunek,,
- Division of Surface Engineering
, Sebastian Okrasa ZIP
Sebastian Okrasa,,
- Division of Surface Engineering
, Roch Kwiatkowski - Narodowe Centrum Badań Jądrowych NCBJ
Roch Kwiatkowski,,
-
, Karol Malinowski
Karol Malinowski,,
-
, Elżbieta Składnik-Sadowska - Narodowe Centrum Badań Jądrowych NCBJ
Elżbieta Składnik-Sadowska,,
-
, Marek Sadowski - [Narodowe Centrum Badań Jądrowych NCBJ]
Marek Sadowski,,
-
- Narodowe Centrum Badań Jądrowych NCBJ
Journal seriesVacuum, ISSN 0042-207X
Issue year2016
Vol128
No1
Pages259-264
Publication size in sheets0.5
Keywords in EnglishImpulse plasma deposition; Gas controlled impulse plasma deposition; Plasmoids structure; Optical emission spectroscopy of plasmoids
DOIDOI:10.1016/j.vacuum.2016.03.002
URL http://ac.els-cdn.com/S0042207X16300458/1-s2.0-S0042207X16300458-main.pdf?_tid=7e94d114-0320-11e7-8347-00000aab0f6b&acdnat=1488882555_0aaa24ebf5d36694dc2c94cfbf934d53
Languageen angielski
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tribution during the coating deposition with the use of the Impulse Plasma Deposition method controlled by the gas injection.pdf (file archived - login or check accessibility on faculty) tribution during the coating deposition with the use of the Impulse Plasma Deposition method controlled by the gas injection.pdf 2.42 MB
Score (nominal)25
ScoreMinisterial score = 25.0, 28-11-2017, ArticleFromJournal
Ministerial score (2013-2016) = 25.0, 28-11-2017, ArticleFromJournal
Publication indicators WoS Impact Factor: 2016 = 1.53 (2) - 2016=1.553 (5)
Citation count*1 (2018-02-21)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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