Optical and electrical properties of boron doped diamond thin conductive films deposited on fused silica glass substrates

Mateusz Ficek , Michał Sobaszek , Marcin Gnyba , Jacek Ryl , Łukasz Gołuński , Mateusz Jakub Śmietana , Jakub Maciej Jasiński , Piotr Caban , Robert Bogdanowicz

Abstract

This paper presents boron-doped diamond (BDD) film as a conductive coating for optical and electronic purposes. Seeding and growth processes of thin diamond films on fused silica have been investigated. Growth processes of thin diamond films on fused silica were investigated at various boron doping level and methane admixture. Two step pre-treatment procedure of fused silica substrate was applied to achieve high seeding density. First, the substrates undergo the hydrogen plasma treatment then spin-coating seeding using a dispersion consisting of detonation nanodiamond in dimethyl sulfoxide with polyvinyl alcohol was applied. Such an approach results in seeding density of 2 × 1010 cm−2. The scanning electron microscopy images showed homogenous, continuous and polycrystalline surface morphology with minimal grain size of 200 nm for highly boron doped films. The sp3/sp2 ratio was calculated using Raman spectra deconvolution method. A high refractive index (range of 2.0-2.4 @550 nm) was achieved for BDD films deposited at 500 °C. The values of extinction coefficient were below 0.1 at λ=550 nm, indicating low absorption of the film. The fabricated BDD thin films displayed resistivity below 48 Ohm cm and transmittance over 60% in the visible wavelength range.
Author Mateusz Ficek
Mateusz Ficek,,
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, Michał Sobaszek
Michał Sobaszek,,
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, Marcin Gnyba
Marcin Gnyba,,
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, Jacek Ryl
Jacek Ryl,,
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, Łukasz Gołuński
Łukasz Gołuński,,
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, Mateusz Jakub Śmietana IMiO
Mateusz Jakub Śmietana,,
- The Institute of Microelectronics and Optoelectronics
, Jakub Maciej Jasiński IMiO
Jakub Maciej Jasiński,,
- The Institute of Microelectronics and Optoelectronics
, Piotr Caban
Piotr Caban,,
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, Robert Bogdanowicz
Robert Bogdanowicz,,
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Journal seriesApplied Surface Science, ISSN 0169-4332
Issue year2016
Vol387
Pages846-856
Publication size in sheets0.5
DOIDOI:10.1016/j.apsusc.2016.06.165
URL http://www.sciencedirect.com/science/article/pii/S0169433216313940
Languageen angielski
Score (nominal)35
ScoreMinisterial score = 35.0, 27-03-2017, ArticleFromJournal
Ministerial score (2013-2016) = 35.0, 27-03-2017, ArticleFromJournal
Publication indicators WoS Impact Factor: 2016 = 3.387 (2) - 2016=3.184 (5)
Citation count*9 (2018-06-18)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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