Calibration of a white-light interferometer with a use of material measures recommended by ISO 25178 series: reliability and uncertainty
Marta Anna Wiśniewska , Sabina Żebrowska-Łucyk
AbstractThere is a discrepancy between rapid pace of introducing more and more sophisticated white-light interferometers and a tardy tempo of developing proper calibration procedures applicable to these machines. Therefore, the authors evaluated both repeatability and credibility of calibration results obtained with a use of PGR and PPT calibration standards recommended by ISO 25178 series. The outcomes of the research, as well as limitations of the calibration artefacts usefulness, are presented in the paper.
|Book||Proc. XXI IMEKO World Congress "Measurement in Research and Industry", 2016, Praga, Czechy, Curran Associates, Inc., New York, ISBN 9781510812925|
|Keywords in English||areal surface metrology, calibration, white-light interferometer|
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