Calibration of a white-light interferometer with a use of material measures recommended by ISO 25178 series: reliability and uncertainty

Marta Anna Wiśniewska , Sabina Żebrowska-Łucyk

Abstract

There is a discrepancy between rapid pace of introducing more and more sophisticated white-light interferometers and a tardy tempo of developing proper calibration procedures applicable to these machines. Therefore, the authors evaluated both repeatability and credibility of calibration results obtained with a use of PGR and PPT calibration standards recommended by ISO 25178 series. The outcomes of the research, as well as limitations of the calibration artefacts usefulness, are presented in the paper.
Author Marta Anna Wiśniewska (FM / IMBE)
Marta Anna Wiśniewska,,
- The Institute of Metrology and Biomedical Engineering
, Sabina Żebrowska-Łucyk (FM / IMBE)
Sabina Żebrowska-Łucyk,,
- The Institute of Metrology and Biomedical Engineering
Pages1571-1574
Book Proc. XXI IMEKO World Congress "Measurement in Research and Industry", 2016, Praga, Czechy, Curran Associates, Inc., New York, ISBN 9781510812925
Keywords in Englishareal surface metrology, calibration, white-light interferometer
Languageen angielski
Score (nominal)15
Citation count*
Cite
Share Share

Get link to the record


* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
Back
Confirmation
Are you sure?