Effect of traps-to-gate tunnel communication on C-V characteristics of MIS capacitors

Andrzej Igor Mazurak , Jakub Maciej Jasiński , Bogdan Majkusiak

Abstract

The admittance measurements are commonly used for extraction of parameters of the traps located in the gate stack of the metal-insulator-semiconductor structures. The extraction procedures are based on models of the MIS structure, which are usually based on a modified Nicollian-Brews' equivalent circuit but do not comprise charge communication between the traps and the gate electrode. The model proposed in this work includes the traps-to gate tunnel communication and is used to discuss its impact on the capacitance-voltage characteristics of a MIS capacitor with a double-layer insulator gate stack.

Author Andrzej Igor Mazurak (FEIT / MO)
Andrzej Igor Mazurak,,
- The Institute of Microelectronics and Optoelectronics
, Jakub Maciej Jasiński (FEIT / MO)
Jakub Maciej Jasiński,,
- The Institute of Microelectronics and Optoelectronics
, Bogdan Majkusiak (FEIT / MO)
Bogdan Majkusiak,,
- The Institute of Microelectronics and Optoelectronics
Journal seriesMicroelectronic Engineering, ISSN 0167-9317, (A 25 pkt)
Issue year2019
Vol215
No15 July 2019
Pages1-5
Publication size in sheets0.5
Article number111011
ASJC Classification2208 Electrical and Electronic Engineering; 2508 Surfaces, Coatings and Films; 3104 Condensed Matter Physics; 3107 Atomic and Molecular Physics, and Optics; 2504 Electronic, Optical and Magnetic Materials
DOIDOI:10.1016/j.mee.2019.111011
URL https://www.sciencedirect.com/science/article/pii/S0167931719301625
projectxxx. Project leader: Beck Romuald, , Phone: (+48) 22 234 75 34, application date 22-12-2011, start date 30-08-2012, planned end date 29-08-2015, IMiO/2011/NCN/5, Implemented
WEiTI Projects financed by NSC [Projekty finansowane przez NCN]
[V4-Japan/01/NaMSeN/02/2015 POLON] Nanophotonics with metal – group-IV-semiconductor nanocomposites: From single nanoobjects to functional ensembles. Project leader: Beck Romuald, , Phone: (+48) 22 234 75 34, application date 29-09-2015, start date 01-02-2016, planned end date 31-01-2019, IMIO/2016/Japan, Implemented
WEiTI Projekty finansowane przez MNiSW
Languageen angielski
Score (nominal)25
ScoreMinisterial score = 25.0, 10-09-2019, ArticleFromJournal
Publication indicators Scopus Citations = 0; WoS Citations = 0; Scopus SNIP (Source Normalised Impact per Paper): 2016 = 0.999; WoS Impact Factor: 2017 = 2.02 (2) - 2017=1.461 (5)
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