Ultrasonic measurement of air temperature along the axis of a laser beam during interferometric measurement of length

Marek Dobosz , Marek Ściuba

Abstract

An ultrasonic technique that allows compensation of air temperature changes and gradients along the beam axis of the laser interferometer during displacement measurement is presented. The system is based on using two ultrasonic paths parallel to the laser beam that operate at different frequencies and continuous waves emitted in opposite directions. The theoretical basis of the measurements is presented. To enable ultrasonic temperature measurement when the measuring reflector is moving, an iterative measurement algorithm is proposed. Experimental assessment of the accuracy of the method is presented. The effect of air temperature gradients along the laser beam axis is tested. The influence of air flow on the measurement accuracy is analyzed.
Author Marek Dobosz (FM / IMBE)
Marek Dobosz,,
- The Institute of Metrology and Biomedical Engineering
, Marek Ściuba (FM / IMBE)
Marek Ściuba,,
- The Institute of Metrology and Biomedical Engineering
Journal seriesMeasurement Science and Technology, ISSN 0957-0233, e-ISSN 1361-6501
Issue year2020
Vol31
No4
Article number045202
Keywords in Englishinterferometer distance measurement, Edlén’s formula, temperature compensation in interferometer length measurement, ultrasonic temperature measurement
ASJC Classification2604 Applied Mathematics; 3105 Instrumentation
DOIDOI:10.1088/1361-6501/ab491b
URL https://iopscience.iop.org/article/10.1088/1361-6501/ab491b
Languageen angielski
Score (nominal)70
Score sourcejournalList
ScoreMinisterial score = 70.0, 08-06-2020, ArticleFromJournal
Publication indicators WoS Citations = 0; Scopus Citations = 0; Scopus SNIP (Source Normalised Impact per Paper): 2017 = 1.061; WoS Impact Factor: 2018 = 1.861 (2) - 2018=1.937 (5)
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