Tailoring properties of lossy-mode resonance optical ﬁber sensors with atomic layer deposition technique
Kamil Kosiel , Marcin Koba , Marcin Masiewicz , Mateusz Jakub Śmietana
AbstractThe paper shows application of atomic layer deposition (ALD) technique as a tool for tailoring sensorial properties of lossy-mode-resonance (LMR)-based optical fiber sensors. Hafnium dioxide (HfO2), zirconium dioxide (ZrO2), and tantalum oxide (TaxOy), as high-refractive-index dielectrics that are particularly convenient for LMR-sensor fabrication, were deposited by low-temperature (100 °C) ALD ensuring safe conditions for thermally vulnerable fibers. Applicability of HfO2 and ZrO2 overlays, deposited with ALD-related atomic level thickness accuracy for fabrication of LMR-sensors with controlled sensorial properties was presented. Additionally, for the first time according to our best knowledge, the double-layer overlay composed of two different materials - silicon nitride (SixNy) and TaxOy - is presented for the LMR fiber sensors. The thin films of such overlay were deposited by two different techniques – PECVD (the SixNy) and ALD (the TaxOy). Such approach ensures fast overlay fabrication and at the same time facility for resonant wavelength tuning, yielding devices with satisfactory sensorial properties.
|Journal series||Optics and Laser Technology, ISSN 0030-3992|
|Publication size in sheets||0.5|
|Keywords in English||Optical fiber sensors; Lossy-mode resonance; Thin films; Atomic layer deposition; Optical properties|
|project||x. Project leader: Śmietana Mateusz Jakub,
, Phone: (22) 234 63 64, start date 20-05-2015, planned end date 19-05-2019, IMiO/2015/NCN/2, Implemented
|Score|| = 25.0, 25-01-2018, ArticleFromJournal|
= 30.0, 25-01-2018, ArticleFromJournal
|Publication indicators||: 2016 = 2.109 (2) - 2016=1.801 (5)|
* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.