Tailoring properties of lossy-mode resonance optical fiber sensors with atomic layer deposition technique

Kamil Kosiel , Marcin Koba , Marcin Masiewicz , Mateusz Jakub Śmietana

Abstract

The paper shows application of atomic layer deposition (ALD) technique as a tool for tailoring sensorial properties of lossy-mode-resonance (LMR)-based optical fiber sensors. Hafnium dioxide (HfO2), zirconium dioxide (ZrO2), and tantalum oxide (TaxOy), as high-refractive-index dielectrics that are particularly convenient for LMR-sensor fabrication, were deposited by low-temperature (100 °C) ALD ensuring safe conditions for thermally vulnerable fibers. Applicability of HfO2 and ZrO2 overlays, deposited with ALD-related atomic level thickness accuracy for fabrication of LMR-sensors with controlled sensorial properties was presented. Additionally, for the first time according to our best knowledge, the double-layer overlay composed of two different materials - silicon nitride (SixNy) and TaxOy - is presented for the LMR fiber sensors. The thin films of such overlay were deposited by two different techniques – PECVD (the SixNy) and ALD (the TaxOy). Such approach ensures fast overlay fabrication and at the same time facility for resonant wavelength tuning, yielding devices with satisfactory sensorial properties.
Author Kamil Kosiel - Institute of Electron Technology (ITE)
Kamil Kosiel,,
-
, Marcin Koba
Marcin Koba,,
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, Marcin Masiewicz IMiO
Marcin Masiewicz,,
- The Institute of Microelectronics and Optoelectronics
, Mateusz Jakub Śmietana IMiO
Mateusz Jakub Śmietana,,
- The Institute of Microelectronics and Optoelectronics
Journal seriesOptics and Laser Technology, ISSN 0030-3992
Issue year2018
Vol102
NoJune 2018
Pages213-221
Publication size in sheets0.5
Keywords in EnglishOptical fiber sensors; Lossy-mode resonance; Thin films; Atomic layer deposition; Optical properties
DOIDOI:10.1016/j.optlastec.2018.01.002
URL https://www.sciencedirect.com/science/article/pii/S0030399217315219
projectx. Project leader: Śmietana Mateusz Jakub, , Phone: (22) 234 63 64, start date 20-05-2015, planned end date 19-05-2019, IMiO/2015/NCN/2, Implemented
WEiTI Projects financed by NSC [Projekty finansowane przez NCN]
Languageen angielski
Score (nominal)30
ScoreMinisterial score = 25.0, 25-01-2018, ArticleFromJournal
Ministerial score (2013-2016) = 30.0, 25-01-2018, ArticleFromJournal
Publication indicators WoS Impact Factor: 2016 = 2.109 (2) - 2016=1.801 (5)
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