Fabrication and preliminary characterization of infrared photodetectors based on graphene

Robert Paweł Mroczyński , Norbert Kwietniewski , Jerzy Piotrowski , J. Judek , M. Zdrojek , Paweł Szczepański

Abstract

In this work, we report the technology of infrared photodetectors based on graphene layers (GLs). In the course of this work the new set of photolithography masks was especially designed to fabricate test structures. The new masks-set contains a matrix of different types of photodetector structures with varied active area dimensions, as well as additional module for characterization of electro-physical parameters of graphene and graphene-based devices. After careful optimization of consecutive technological steps, test structures were fabricated. First results of electrical characterization of obtained graphene-based photodetectors demonstrated that the developed technology was successful, however, further detailed optical characterization towards sensing parameters and potential applications in infrared detectors is necessary.
Author Robert Paweł Mroczyński IMiO
Robert Paweł Mroczyński,,
- The Institute of Microelectronics and Optoelectronics
, Norbert Kwietniewski IMiO
Norbert Kwietniewski,,
- The Institute of Microelectronics and Optoelectronics
, Jerzy Piotrowski IMiO
Jerzy Piotrowski,,
- The Institute of Microelectronics and Optoelectronics
, J. Judek
J. Judek,,
-
, M. Zdrojek
M. Zdrojek,,
-
, Paweł Szczepański IMiO - [Instytut Łączności PIB (IŁ PIB)]
Paweł Szczepański,,
- The Institute of Microelectronics and Optoelectronics
- Instytut Łączności PIB
Pages1-7
Publication size in sheets0.5
Book Swatowska Barbara, Maziarz Wojciech, Pisarkiewicz Tadeusz, Kucewicz Wojciech (eds.): Proceedings of SPIE Electron Technology Conference 2016, vol. 1, no. 10175, 2016, SPIE, ISBN 9781510608436, 354 p., DOI:10.1117/12.2270351
Keywords in EnglishFabrication; Graphene; Photodetectors; Infrared detectors; Matrices; Optical lithography
DOIDOI:10.1117/12.2261659
URL http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2595284
Languageen angielski
Score (nominal)15
ScoreMinisterial score = 15.0, 27-03-2017, BookChapterMatConfByIndicator
Ministerial score (2013-2016) = 15.0, 27-03-2017, BookChapterMatConfByIndicator
Citation count*0 (2018-07-18)
Additional fields
Numer pracy101750U
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