Fabrication and preliminary characterization of infrared photodetectors based on graphene
Robert Paweł Mroczyński , Norbert Kwietniewski , Jerzy Piotrowski , J. Judek , M. Zdrojek , Paweł Szczepański
AbstractIn this work, we report the technology of infrared photodetectors based on graphene layers (GLs). In the course of this work the new set of photolithography masks was especially designed to fabricate test structures. The new masks-set contains a matrix of different types of photodetector structures with varied active area dimensions, as well as additional module for characterization of electro-physical parameters of graphene and graphene-based devices. After careful optimization of consecutive technological steps, test structures were fabricated. First results of electrical characterization of obtained graphene-based photodetectors demonstrated that the developed technology was successful, however, further detailed optical characterization towards sensing parameters and potential applications in infrared detectors is necessary.
|Publication size in sheets||0.5|
|Book||Swatowska Barbara, Maziarz Wojciech, Pisarkiewicz Tadeusz, Kucewicz Wojciech (eds.): Proceedings of SPIE Electron Technology Conference 2016, vol. 1, no. 10175, 2016, SPIE, ISBN 9781510608436, 354 p., DOI:10.1117/12.2270351|
|Keywords in English||Fabrication; Graphene; Photodetectors; Infrared detectors; Matrices; Optical lithography|
|Score|| = 15.0, 27-03-2017, BookChapterMatConfByIndicator|
= 15.0, 27-03-2017, BookChapterMatConfByIndicator
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