Effect of oxygen plasma modification on refractive index sensing with micro-cavity in-line Mach-Zehnder interferometer

Anna Dębowska , Magdalena Dominik , Marcin Koba , Monika Janik , Wojtek J. Bock , Mateusz Jakub Śmietana


A micro-cavity in-line Mach-Zehnder interferometer (μIMZI) is an optical sensing structure fabricated in an optical fiber. Its design allows for refractive index sensing of liquid and gas in picoliter volumes, making it suitable for biochemical and medical sensing where measured material is often scarce. The fabricated structures show satisfactory levels of sensitivity, from about 400 nm/RIU in the near-water range of solutions (nD 1.336±0.003 RIU) to about 16 000 nm/RIU for solutions in approximate range from nD = 1.35 RIU to nD = 1.4 RIU. The structures were subjected to oxygen plasma, the process which was supposed to modify physical parameters of the structures, i.e., cavity surface wettability and roughness, and in consequence their sensitivity. As a result of the oxygen plasma modification we have observed a improved wettability of the structure surface, what makes it easier to introduce liquid into the cavity and simplifies the measurement process. In the case where the plasma processing is preceded by biological layer deposition, the bottom surface of the structure is smoothed and slightly deepened, causing a shift in the transmission spectrum and change in sensitivity.
Author Anna Dębowska (FEIT / MO)
Anna Dębowska,,
- The Institute of Microelectronics and Optoelectronics
, Magdalena Dominik (FEIT / MO)
Magdalena Dominik,,
- The Institute of Microelectronics and Optoelectronics
, Marcin Koba - [Instytut Łączności PIB (IŁ PIB)]
Marcin Koba,,
- Instytut Łączności PIB
, Monika Janik - [Universite du Quebec en Outaouais]
Monika Janik,,
, Wojtek J. Bock - [Universite du Quebec en Outaouais]
Wojtek J. Bock,,
, Mateusz Jakub Śmietana (FEIT / MO)
Mateusz Jakub Śmietana,,
- The Institute of Microelectronics and Optoelectronics
Publication size in sheets0.5
Book Swatowska Barbara, Maziarz Wojciech, Pisarkiewicz Tadeusz, Kucewicz Wojciech (eds.): Proceedings of SPIE Electron Technology Conference 2016, vol. 1, no. 10175, 2016, P.O.Box 10, Bellingham, Washington 98227-0010 USA, SPIE, ISBN 9781510608436, 354 p., DOI:10.1117/12.2270351
Keywords in EnglishOxygen; Plasmas; Refractive index; Mach-Zehnder interferometer; Optical fibers; Optical sensing; Water
URL http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2595277
Languageen angielski
Score (nominal)15
Score sourceconferenceIndex
ScoreMinisterial score = 15.0, 11-02-2020, BookChapterMatConfByIndicator
Ministerial score (2013-2016) = 15.0, 11-02-2020, BookChapterMatConfByIndicator
Publication indicators Scopus Citations = 1; WoS Citations = 0; GS Citations = 1.0
Citation count*1 (2020-09-22)
Additional fields
Numer pracy101750N
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