IDEs structures created in the physical vacuum deposition process on textile substrates
E. Korzeniewska , A. Szczęsny , Dominik Krzysztof Kasprowicz
AbstractThe article proposes a method for producing interdigitated electrodes structures on a flexible composite substrate in the physical vacuum deposition process. Ag and Au with a purity of 99.99% were used as deposited metals. The results of impedance measurement of created structures in the range up to 500 kHz are presented. Based on the results of computer simulation, an equivalent circuit for computer simulation of the structures has been proposed based on measurement result. It can be used in the design of sensors built based on IDEs in textronic systems. The very high agreement was obtained between impedance measurements and simulation results up to tens of kilohertz.
|Journal series||Journal of Physics - Conference Series, ISSN 1742-6588, e-ISSN 1742-6596, [1742-6596]|
|Publication size in sheets||0.5|
|Conference||Microtechnology and thermal problems in electronics (MICROTHERM 2019), 24-06-2019 - 26-06-2019, Łódź, Polska|
|Score||= 40.0, 06-07-2020, ArticleFromConference|
|Publication indicators||: 2018 = 0.454|
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