IDEs structures created in the physical vacuum deposition process on textile substrates

E. Korzeniewska , A. Szczęsny , Dominik Krzysztof Kasprowicz

Abstract

The article proposes a method for producing interdigitated electrodes structures on a flexible composite substrate in the physical vacuum deposition process. Ag and Au with a purity of 99.99% were used as deposited metals. The results of impedance measurement of created structures in the range up to 500 kHz are presented. Based on the results of computer simulation, an equivalent circuit for computer simulation of the structures has been proposed based on measurement result. It can be used in the design of sensors built based on IDEs in textronic systems. The very high agreement was obtained between impedance measurements and simulation results up to tens of kilohertz.
Author E. Korzeniewska
E. Korzeniewska,,
-
, A. Szczęsny
A. Szczęsny,,
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, Dominik Krzysztof Kasprowicz (FEIT / MO)
Dominik Krzysztof Kasprowicz,,
- The Institute of Microelectronics and Optoelectronics
Journal seriesJournal of Physics - Conference Series, ISSN 1742-6588, e-ISSN 1742-6596, [1742-6596]
Issue year2020
Vol1534
Pages1-8
Publication size in sheets0.5
Article number012004
ConferenceMicrotechnology and thermal problems in electronics (MICROTHERM 2019), 24-06-2019 - 26-06-2019, Łódź, Polska
ASJC Classification3100 General Physics and Astronomy
DOIDOI:10.1088/1742-6596/1534/1/012004
URL https://iopscience.iop.org/article/10.1088/1742-6596/1534/1/012004
Languageen angielski
Score (nominal)40
Score sourcejournalList
ScoreMinisterial score = 40.0, 06-07-2020, ArticleFromConference
Publication indicators Scopus SNIP (Source Normalised Impact per Paper): 2018 = 0.454
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