Determination of sp 3 fraction in ta-C coating using XPS and Raman spectroscopy

Viktor Zavaleyev , Jan Walkowicz , Mirosław Sawczak , Marek Klein , Dariusz Moszyński , Rafał Chodun , Krzysztof Zdunek

Abstract

The paper presents results of studies on the structure of tetrahedral amorphous carbon films (ta-C) with a thickness in the range from 20 to 280 nm, deposited using pulsed vacuum arc technique with an electromagnetic Venetian blind plasma filter. The results of the phase structure analysis, obtained using visible Raman spectroscopy and UV Raman spectroscopy methods, showed a strong dependence of the results on the presence, on the surface of synthesized thin carbon films, even of a minimum number of microparticles. The presence of microparticles in the deposited coatings strongly affects the accuracy of the measured data, used next for calculation the ID/IG, IT/IG ratios and determination of the G-peak dispersion, for all coating thicknesses, which pointed to significant diversification in sp3-bonds content in deposited films.
Author Viktor Zavaleyev - [Politechnika Koszalińska]
Viktor Zavaleyev,,
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- Politechnika Koszalińska
, Jan Walkowicz - Politechnika Koszalińska
Jan Walkowicz,,
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, Mirosław Sawczak
Mirosław Sawczak,,
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, Marek Klein - The Szewalski Institute of Fluid-Flow Machinery Polish Academy of Sciences (IMP PAN)
Marek Klein,,
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, Dariusz Moszyński - Zachodniopomorski Uniwersytet Technologiczny w Szczecinie, Wydział Informatyczny (WI ZUT)
Dariusz Moszyński,,
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, Rafał Chodun ZIP
Rafał Chodun,,
- Division of Surface Engineering
, Krzysztof Zdunek ZIP
Krzysztof Zdunek,,
- Division of Surface Engineering
Journal seriesProblems of Atomic Science and Technology, ISSN 1562-6016
Issue year2016
Vol104
No4
Pages84-92
Publication size in sheets0.5
URL http://vant.kipt.kharkov.ua/TABFRAME2.html
Languageen angielski
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DETERMINATION OF SP3 FRACTION IN ta-C COATING USING XPS AND RAMAN SPECTROSCOPY.pdf (file archived - login or check accessibility on faculty) DETERMINATION OF SP3 FRACTION IN ta-C COATING USING XPS AND RAMAN SPECTROSCOPY.pdf 716.33 KB
Score (nominal)15
ScoreMinisterial score = 0.0, 28-11-2017, ArticleFromJournal
Ministerial score (2013-2016) = 15.0, 28-11-2017, ArticleFromJournal
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