AFM studies of stiction properties of ultrathin polysilicon films
Marcin Michałowski , Zygmunt Rymuza , Voicu Rodica , Obreja Cosmin , Baracu Angela , Muller Raluca
AbstractThe paper presents the analysis of the sticking properties of ultrathin polysilicon films and their correlation with the temperature (and resulted roughness) at which the film has been deposited. The force distance curves (FDC) has been done with an atomic force microscope (AFM). Temperature impacts roughness of the surface, which in turn influences adhesion of the sample. Study has been done for various humidities to find optimal parameters for deposition of the films. Additional properties of the samples such as wettability, roughness and mechanical parameters have been taken into consideration in the stiction studies.
|Publication size in sheets||0.5|
|Book||Jabłoński Ryszard, Březina Tomáš (eds.): Advanced Mechatronics Solutions, Advances in Intelligent Systems and Computing, 2016, Springer, ISBN 978-3-319-23921-7, 668 p., DOI:10.1007/978-3-319-23923-1|
|Keywords in English||stiction MEMS polysilicon films|
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