AFM studies of stiction properties of ultrathin polysilicon films

Marcin Michałowski , Zygmunt Rymuza , Voicu Rodica , Obreja Cosmin , Baracu Angela , Muller Raluca

Abstract

The paper presents the analysis of the sticking properties of ultrathin polysilicon films and their correlation with the temperature (and resulted roughness) at which the film has been deposited. The force distance curves (FDC) has been done with an atomic force microscope (AFM). Temperature impacts roughness of the surface, which in turn influences adhesion of the sample. Study has been done for various humidities to find optimal parameters for deposition of the films. Additional properties of the samples such as wettability, roughness and mechanical parameters have been taken into consideration in the stiction studies.
Author Marcin Michałowski IMiF
Marcin Michałowski,,
- The Institute of Micromechanics and Photonics
, Zygmunt Rymuza IMiF
Zygmunt Rymuza,,
- The Institute of Micromechanics and Photonics
, Voicu Rodica - [National Institute for Research and Development in Microtechnologies -IMT Bucharest]
Voicu Rodica,,
-
- National Institute for Research and Development in Microtechnologies -IMT Bucharest
, Obreja Cosmin - [National Institute for Research and Development in Microtechnologies -IMT Bucharest]
Obreja Cosmin,,
-
- National Institute for Research and Development in Microtechnologies -IMT Bucharest
, Baracu Angela - [National Institute for Research and Development in Microtechnologies -IMT Bucharest]
Baracu Angela,,
-
- National Institute for Research and Development in Microtechnologies -IMT Bucharest
, Muller Raluca - [National Institute for Research and Development in Microtechnologies -IMT Bucharest]
Muller Raluca,,
-
- National Institute for Research and Development in Microtechnologies -IMT Bucharest
Pages347-353
Publication size in sheets0.5
Book Jabłoński Ryszard, Březina Tomáš (eds.): Advanced Mechatronics Solutions, Advances in Intelligent Systems and Computing, 2016, Springer, ISBN 978-3-319-23921-7, 668 p., DOI:10.1007/978-3-319-23923-1
Keywords in Englishstiction MEMS polysilicon films
DOIDOI:10.1007/978-3-319-23923-1_53
URL http://link.springer.com/chapter/10.1007/978-3-319-23923-1_53
Languageen angielski
Score (nominal)15
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