Large-area transparent in visible range silicon carbide photodiode

Michał Borecki , Andrzej Kociubiński , Mariusz Duk , Norbert Kwietniewski , Michael L Korwin-Pawlowski , Piotr Doroz , Jan Szmidt

Abstract

This paper describes the construction, fabrication and properties of large-area ultra violet detector that is transparent in the visible range. The device was made on n-type 4H SiC substrate with a double epitaxial layer in which aluminum was implanted to form a p-n junction close to the surface, and a SiO2 layer was formed for passivation, without a guard ring. The design of the top and bottom electrodes of 4mm diameter UV sensitive area allows not less than 20% visible range transmission. This transmission was measured across sensitive area of examined devices and was only 5% lower than that of the substrate before implantation and electrodes deposition. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Author Michał Borecki (FEIT / MO)
Michał Borecki,,
- The Institute of Microelectronics and Optoelectronics
, Andrzej Kociubiński - [Politechnika Lubelska (PL)]
Andrzej Kociubiński,,
-
- Politechnika Lubelska
, Mariusz Duk - [Politechnika Lubelska]
Mariusz Duk,,
-
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, Norbert Kwietniewski (FEIT / MO)
Norbert Kwietniewski,,
- The Institute of Microelectronics and Optoelectronics
, Michael L Korwin-Pawlowski - [Universite du Quebec en Outaouais]
Michael L Korwin-Pawlowski,,
-
-
, Piotr Doroz - [Warsaw University of Technology (PW)]
Piotr Doroz,,
-
- Politechnika Warszawska
, Jan Szmidt (FEIT / MO)
Jan Szmidt,,
- The Institute of Microelectronics and Optoelectronics
Pages89030H 1-9
Book Romaniuk Ryszard (eds.): Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2013, vol. 8903, 2013, SPIE P.O. Box 10, Bellingham, Washington 98227-0010 USA , SPIE, ISBN 9780819497857, [ISSN 0277-786X ], 410 p., DOI:10.1117/12.2049644
DOIDOI:10.1117/12.2034797
URL http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1763112
Languageen angielski
Score (nominal)15
Score sourceconferenceIndex
ScoreMinisterial score = 10.0, 29-08-2020, BookChapterMatConfByIndicator
Ministerial score (2013-2016) = 15.0, 29-08-2020, BookChapterMatConfByIndicator
Publication indicators WoS Citations = 4; Scopus Citations = 17; GS Citations = 22.0
Citation count*22 (2020-09-21)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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