Investigations of surface properties of SiO2 and Si3N4 thin layers used for MEMS vibrating structures applications

R. Voicu , Zygmunt Rymuza , Marcin Michałowski , C. Obreja , R. Gavrila , R. Muller

Abstract

n/a
Author R. Voicu
R. Voicu,,
-
, Zygmunt Rymuza (FM / IMPh)
Zygmunt Rymuza,,
- The Institute of Micromechanics and Photonics
, Marcin Michałowski (FM / IMPh)
Marcin Michałowski,,
- The Institute of Micromechanics and Photonics
, C. Obreja
C. Obreja,,
-
, R. Gavrila
R. Gavrila,,
-
, R. Muller
R. Muller,,
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Pages111-114
Publication size in sheets0.5
Book Conference Committee (eds.): CAS 2013 Proceedings, 2013, ISBN 978-1-4673-5670-1
URL http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6688104
Languageen angielski
Score (nominal)15
Score sourceconferenceIndex
ScoreMinisterial score = 10.0, 08-04-2020, BookChapterMatConfByConferenceseries
Ministerial score (2013-2016) = 15.0, 08-04-2020, BookChapterMatConfByConferenceseries
Publication indicators WoS Citations = 3; GS Citations = 2.0
Citation count*2 (2015-04-09)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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