Annealing time effects on the surface morphology of C–Pd films prepared on silicon covered with SiO2

Mirosław Kozłowski , Joanna Radomska , Halina Wronka , Elżbieta Czerwosz , Piotr Firek , Kamil Sobczak , Piotr Dłużewski

Abstract

Morphology changes of C–Pd films prepared in physical vapor deposition (PVD) process and next annealed in a temperature of 650 °C during different time were studied. These studies were performed with electron microscopy methods (scanning SEM and transmission TEM). It was found that not annealed films are flat and they are composed of grains with composite character and size of 100–200 nm. Pd nanocrystallite of a diameter of a few nanometers in some carbon matrix was placed in these grains. For annealed films, a formation of palladium nanograins with different sizes and shapes as well as a porous carbon matrix were observed. High resolution TEM investigation was used to determine a structure of all these grains. An increase in duration time of annealing process led to diminishing of the porosity of carbon matrix and a number of Pd grains situated on the film surface. It was also stated that covering of Si with SiO2 layer prevents formation of palladium silicide.
Author Mirosław Kozłowski - [Instytut Tele-i Radiotechniczny, Warszawa]
Mirosław Kozłowski,,
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, Joanna Radomska - [Instytut Tele-i Radiotechniczny, Warszawa]
Joanna Radomska,,
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, Halina Wronka - [Instytut Tele-i Radiotechniczny, Warszawa]
Halina Wronka,,
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, Elżbieta Czerwosz - [Instytut Tele-i Radiotechniczny, Warszawa]
Elżbieta Czerwosz,,
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, Piotr Firek (FEIT / MO)
Piotr Firek,,
- The Institute of Microelectronics and Optoelectronics
, Kamil Sobczak - [Institute of Physics of the Polish Academy of Sciences]
Kamil Sobczak,,
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, Piotr Dłużewski - [Institute of Physics of the Polish Academy of Sciences]
Piotr Dłużewski,,
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Journal seriesOptica Applicata, ISSN 0078-5466
Issue year2013
VolXLIII
No1
Pages1
Keywords in EnglishPd, carbon, film, SEM, TEM.
ASJC Classification3107 Atomic and Molecular Physics, and Optics; 2504 Electronic, Optical and Magnetic Materials
DOIDOI:10.5277/oa130111
URL http://deteh.eu/promo/itr/p14.pdf
Languageen angielski
File
Annealing time effects on the surface morphology.pdf 2.25 MB
Score (nominal)15
Score sourcejournalList
ScoreMinisterial score = 15.0, 15-08-2020, ArticleFromJournal
Ministerial score (2013-2016) = 15.0, 15-08-2020, ArticleFromJournal
Publication indicators Scopus Citations = 2; WoS Citations = 2; GS Citations = 3.0; Scopus SNIP (Source Normalised Impact per Paper): 2013 = 0.752; WoS Impact Factor: 2013 = 0.643 (2) - 2013=0.558 (5)
Citation count*3 (2020-08-30)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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