Measurement System Based on Multi-Wavelength Interferometry for Long Gauge Block Calibration

Michał Wengierow , Leszek Sałbut , Zbigniew Ramotowski , Robert Szumski , Ksawery Szykiedans

Abstract

This paper shows the result of work of the Institute of Micromechanics and Photonics at Warsaw University of Technology and the Length and Angle Division of Central Office of Measures (GUM) [1] in building an automatic multiwavelength interferometric system with extended measurement range for calibration of long (up to 1 m) gauge blocks. The design of a full working setup with environmental condition control and monitoring systems, as well as image analysis software, is presented. For length deviation determination the phase fraction approach is proposed and described. To confirm that the system is capable of calibrating gauge blocks with assumed accuracy, a comparison between the results of 300 mm length gauge block measurement obtained by using other systems from the Central Office of Measures is made. Statistical analysis proved that the system can be used for high precision measurements with assumed standard uncertainty (125 nm for a length of 1 m). Finally the comparison between our results obtained for a long gauge block set (600 mm to 1000 mm long) and previous calibrations made by the Physikalisch-Technische Bundesanstalt (PTB) [2] is shown
Author Michał Wengierow (FM / IMPh)
Michał Wengierow,,
- The Institute of Micromechanics and Photonics
, Leszek Sałbut (FM / IMPh)
Leszek Sałbut,,
- The Institute of Micromechanics and Photonics
, Zbigniew Ramotowski
Zbigniew Ramotowski,,
-
, Robert Szumski (FM / IMPh)
Robert Szumski,,
- The Institute of Micromechanics and Photonics
, Ksawery Szykiedans (FM / IMPh)
Ksawery Szykiedans,,
- The Institute of Micromechanics and Photonics
Journal seriesMetrology and Measurement Systems, ISSN 0860-8229
Issue year2013
Vol20
No3
Pages479-490
Keywords in Englishgauge block; multi-wavelength; interferometry
ASJC Classification3105 Instrumentation; 2207 Control and Systems Engineering
DOIDOI:10.2478/mms-2013-0041
URL http://www.degruyter.com/view/j/mms.2013.20.issue-3/mms-2013-0041/mms-2013-0041.xml
Languageen angielski
Score (nominal)20
Score sourcejournalList
ScoreMinisterial score = 20.0, 27-02-2020, ArticleFromJournal
Ministerial score (2013-2016) = 20.0, 27-02-2020, ArticleFromJournal
Publication indicators Scopus Citations = 4; WoS Citations = 3; GS Citations = 13.0; Scopus SNIP (Source Normalised Impact per Paper): 2014 = 1.213; WoS Impact Factor: 2013 = 0.609 (2) - 2013=0.564 (5)
Citation count*14 (2020-09-21)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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