Plasma post-processing of diamond-like carbon nano-coated long-period gratings

Mateusz Jakub Śmietana , Adrian Krysiński Krysiński , Wojtek J. Bock , P. Mikulic


This work presents an application of reactive ion etching (RIE) for effective tuning of spectral response and the refractive-index (RI) sensitivity of diamond-like carbon (DLC) nano-coated long-period gratings (LPGs). The technique allows for an efficient and well controlled etching of the DLC by means of O2 and CF4 plasma. The effect of DLC nanocoating etching on spectral properties of the LPGs is discussed. We correlated the decrease in DLC thickness with the shift of the LPG resonance wavelength. The thinning of the overlay effectively changes the distribution of the cladding modes and thus it also has an impact on the device’s RI sensitivity. The advantage of this approach is a capability for post-processing of the nano-coated structures with a good precision (etching rate from 4.6 to 8.1 nm/min for O2 plasma), cleaning the samples and their re-coating according to requested needs. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Author Mateusz Jakub Śmietana (FEIT / MO)
Mateusz Jakub Śmietana,,
- The Institute of Microelectronics and Optoelectronics
, Adrian Krysiński Krysiński - [Warsaw University of Technology (PW)]
Adrian Krysiński Krysiński,,
- Politechnika Warszawska
, Wojtek J. Bock - [Universite du Quebec en Outaouais]
Wojtek J. Bock,,
, P. Mikulic - [Universite du Quebec en Outaouais]
P. Mikulic,,
Book Yang Minghong , Wang Dongning , Rao Yun-Jiang (eds.): Proceedings of SPIE: Fourth Asia Pacific Optical Sensors Conference, vol. 8924, 2013, PO Box 10, Bellingham WA 98227-0010, USA , SPIE, ISBN 9780819498168, 520 p., DOI:10.1117/12.2047039
892401.pdf / 463.36 KB / No licence information
Languageen angielski
Score (nominal)0
ScoreMinisterial score = 0.0, 25-02-2020, BookChapterMatConfByConferenceseries
Ministerial score (2013-2016) = 0.0, 25-02-2020, BookChapterMatConfByConferenceseries
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