Investigation of metal distribution and carbide crystallite formation in metal-doped carbon films (a-C:Me, Me = Ti, V, Zr, W) with low metal content

C. Adelhelm , M. Balden , Marcin Rasiński , S. Lindig , Tomasz Płociński , E. Welter , M. Sikora

Abstract

Metal-doped amorphous carbon films (a-C:Me) were deposited at room temperature by magnetron sputtering using a metal (Me = Ti, V, Zr, W) and a graphite target. The metal distribution and the temperature-induced carbide crystallite formation were analyzed by X-ray diffraction (XRD), electron microscopy (TEM, STEM) and X-ray absorption spectroscopy (EXAFS, XANES), focusing on low metal concentrations between 6.5 and 9.5%. In as-deposited samples, the metal atoms are atomically distributed in the carbon matrix without significant formation of carbide particles. With annealing to 900K the local atomic environment around the metal atoms becomes similar to the carbide. The carbide crystallites grow with annealing up to 1300K, their size is dependent on the metal type: V > Ti > Zr≈W. W2C and WC1-x crystallites were identified for W-doped films, whereas the monocarbides are formed for the other metals. It is demonstrated, that EXAFS and high resolution electron microscopy are required to get a correct picture of the structure of the analyzed a-C:W films. © 2011.
Author C. Adelhelm - [Max Planck Institut für Plasmaphysik]
C. Adelhelm,,
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, M. Balden - [Max Planck Institut für Plasmaphysik]
M. Balden,,
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, Marcin Rasiński (FMSE / DMD)
Marcin Rasiński,,
- Division of Materials Design
, S. Lindig - [Max Planck Institut für Plasmaphysik]
S. Lindig,,
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, Tomasz Płociński (FMSE / DMD)
Tomasz Płociński,,
- Division of Materials Design
, E. Welter - [Deutsche Elektronen-Synchrotron]
E. Welter,,
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, M. Sikora - [European Synchrotron Radiation Facility]
M. Sikora,,
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Journal seriesSurface and Coatings Technology, ISSN 0257-8972, (A 40 pkt)
Issue year2011
Vol205
No19
Pages4335 - 4342
Publication size in sheets0.5
Keywords in EnglishAmorphous carbon; Carbide; EXAFS; TEM; XRD
ASJC Classification2505 Materials Chemistry; 2508 Surfaces, Coatings and Films; 3110 Surfaces and Interfaces; 3104 Condensed Matter Physics; 1600 General Chemistry
DOIDOI:10.1016/j.surfcoat.2011.02.034
URL https://www.scopus.com/inward/record.uri?eid=2-s2.0-79955908371&partnerID=40&md5=448f6a6948e26fd606f4d5da6316a3d3
Languageen angielski
File
Investigation-of-metal-distribution-and-carbide-crystallit_2011_Surface-and-.pdf 1.56 MB
Score (nominal)40
Score sourcejournalList
Publication indicators WoS Citations = 8; Scopus Citations = 9; Scopus SNIP (Source Normalised Impact per Paper): 2014 = 1.681; WoS Impact Factor: 2011 = 1.867 (2) - 2011=2.193 (5)
Citation count*14 (2020-01-31)
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