Topography Measurement of High Numerical Aperture Microlenses with Digital Holographic Microscopy

Tomasz Kozacki , Kamil Liżewski , Julianna Kostencka , Michał Józwik

Abstract

This work focuses on the topography measurement of high NA microlenses using digital holography (DH) in microscopic setup. The necessary modifications are discussed to provide DH with capability of accurate characterization microlens of high NA.
Author Tomasz Kozacki (FM / IMPh)
Tomasz Kozacki,,
- The Institute of Micromechanics and Photonics
, Kamil Liżewski (FM / IMPh)
Kamil Liżewski,,
- The Institute of Micromechanics and Photonics
, Julianna Kostencka (FM / IMPh)
Julianna Kostencka,,
- The Institute of Micromechanics and Photonics
, Michał Józwik (FM / IMPh)
Michał Józwik,,
- The Institute of Micromechanics and Photonics
Pages1-1
Publication size in sheets0.3
Book Kohala Coast: Digital Holography and Three-Dimensional Imaging, 2013, ISBN 978-1-55752-964-0
Keywords in Englishdigital holography, height measurement, superresolution
DOIDOI:10.1364/DH.2013.DTu2A.6
URL http://www.opticsinfobase.org/abstract.cfm?uri=DH-2013-DTu2A.6
Languageen angielski
Score (nominal)0
Publication indicators GS Citations = 2.0
Citation count*2 (2020-08-21)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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