Interface traps in Al/HfO2/SiO2/4H-SiC metal-insulator-semiconductor (MIS) structures studied by the thermally-stimulated current (TSC) technique

Mariusz Sochacki , Krystian Bogumił Król , Michał Waśkiewicz , Katarzyna Racka , Jan Szmidt

Abstract

Thermally-stimulated current (TSC) is presented as a powerful technique for investigation of shallow interface traps in metal-insulator-semiconductor (MIS) structures fabricated on wide bandgap semiconductors. This work highlighted often made mistakes during the characterization of MIS structures with this technique which was originally used for the characterization of the structures on silicon. Accuracy of the results can be significantly improved by the implementation of the proposed methods of analysis.
Author Mariusz Sochacki IMiO
Mariusz Sochacki,,
- The Institute of Microelectronics and Optoelectronics
, Krystian Bogumił Król
Krystian Bogumił Król,,
-
, Michał Waśkiewicz IMiO
Michał Waśkiewicz,,
- The Institute of Microelectronics and Optoelectronics
, Katarzyna Racka
Katarzyna Racka,,
-
, Jan Szmidt IMiO
Jan Szmidt,,
- The Institute of Microelectronics and Optoelectronics
Journal seriesMicroelectronic Engineering, ISSN 0167-9317
Issue year2016
Vol157
Pages46-51
Publication size in sheets0.3
Keywords in English4H-SiC; Thermally-stimulated current; TSC; High-k; MOS structure
DOIDOI:10.1016/j.mee.2016.02.047
URL http://www.sciencedirect.com/science/article/pii/S0167931716300892
projectDEvelopment of an accurate model of traps in metal/insulator/4H-SiC structures by Thermally Stimulated Current (TSC) measurements. Project leader: Szmidt Jan, , Phone: (48 22) 234 75 99; 234 77 76, start date 11-07-2013, end date 10-07-2015, IMiO/2013/NCN/4, Completed
WEiTI Projects financed by NSC [Projekty finansowane przez NCN]
Languageen angielski
Score (nominal)25
ScoreMinisterial score = 20.0, 27-03-2017, ArticleFromJournal
Ministerial score (2013-2016) = 25.0, 27-03-2017, ArticleFromJournal
Publication indicators WoS Impact Factor: 2016 = 1.806 (2) - 2016=1.415 (5)
Citation count*2 (2018-02-19)
Cite
Share Share



* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
Back