Nichrome micro-heaters as actuators for microfluidic sensors

Mateusz Gęca , T. Lizak , Andrzej Kociubiński , Michał Borecki , Michael L. Korwin-Pawlowski

Abstract

MEMS actuators are currently widely used in the industry. Micro-heaters, being a prime example, attracted much attention in recent years due to their good operating parameters and low cost fabrication process. This paper focuses on a design and development of a micro-heater to be used as an actuator in a multiparametric capillary sensor. The micro-heater is an evolution of a previous design and uses a 200nm-thick thin film of 80/20 NiCr alloy as a heating layer. The paper presents results of fabrication and testing of the micro-heater, including temperature distribution and resistance changes during the heating cycle. Additionally, is presented a PWM based control system providing the stability of power and temperature distribution. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Author Mateusz Gęca
Mateusz Gęca,,
-
, T. Lizak
T. Lizak,,
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, Andrzej Kociubiński
Andrzej Kociubiński,,
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, Michał Borecki IMiO
Michał Borecki,,
- The Institute of Microelectronics and Optoelectronics
, Michael L. Korwin-Pawlowski
Michael L. Korwin-Pawlowski,,
-
Pages1-8
Publication size in sheets0.5
Book Romaniuk Ryszard (eds.): Proc. SPIE. 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, vol. 10031, 2016, SPIE , ISBN 9781510604858, [781510604865 (electronic) ], 1170 p., DOI:10.1117/12.2257157
Keywords in Englishmicro-heater, NiCr, capillary sensor, multiparametric sensor, PWM regulation
DOIDOI:10.1117/12.2249184
URL http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2564869
Languageen angielski
Score (nominal)15
ScoreMinisterial score = 15.0, 27-03-2017, BookChapterMatConf
Ministerial score (2013-2016) = 15.0, 27-03-2017, BookChapterMatConf
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