Nichrome micro-heaters as actuators for microfluidic sensors
Mateusz Gęca , T. Lizak , Andrzej Kociubiński , Michał Borecki , Michael L. Korwin-Pawlowski
Abstract
MEMS actuators are currently widely used in the industry. Micro-heaters, being a prime example, attracted much attention in recent years due to their good operating parameters and low cost fabrication process. This paper focuses on a design and development of a micro-heater to be used as an actuator in a multiparametric capillary sensor. The micro-heater is an evolution of a previous design and uses a 200nm-thick thin film of 80/20 NiCr alloy as a heating layer. The paper presents results of fabrication and testing of the micro-heater, including temperature distribution and resistance changes during the heating cycle. Additionally, is presented a PWM based control system providing the stability of power and temperature distribution. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.| Author | |
| Pages | 1-8 |
| Publication size in sheets | 0.5 |
| Book | Romaniuk Ryszard (eds.): Proc. SPIE. 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, vol. 10031, 2016, SPIE , ISBN 9781510604858, [781510604865 (electronic) ], 1170 p., DOI:10.1117/12.2257157 |
| Keywords in English | micro-heater, NiCr, capillary sensor, multiparametric sensor, PWM regulation |
| DOI | DOI:10.1117/12.2249184 |
| URL | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2564869 |
| Language | en angielski |
| Score (nominal) | 15 |
| Score | = 15.0, 27-03-2017, BookChapterMatConf = 15.0, 27-03-2017, BookChapterMatConf |
| Citation count* | 0 |
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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