Nichrome micro-heaters as actuators for microfluidic sensors
Mateusz Gęca , T. Lizak , Andrzej Kociubiński , Michał Borecki , Michael L. Korwin-Pawlowski
AbstractMEMS actuators are currently widely used in the industry. Micro-heaters, being a prime example, attracted much attention in recent years due to their good operating parameters and low cost fabrication process. This paper focuses on a design and development of a micro-heater to be used as an actuator in a multiparametric capillary sensor. The micro-heater is an evolution of a previous design and uses a 200nm-thick thin film of 80/20 NiCr alloy as a heating layer. The paper presents results of fabrication and testing of the micro-heater, including temperature distribution and resistance changes during the heating cycle. Additionally, is presented a PWM based control system providing the stability of power and temperature distribution. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
|Publication size in sheets||0.5|
|Book||Romaniuk Ryszard (eds.): Proc. SPIE. 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, vol. 10031, 2016, P.O. Box 10, Bellingham, Washington 98227-0010 USA , SPIE , ISBN 9781510604858, [781510604865 (electronic) ], 1170 p., DOI:10.1117/12.2257157|
|Keywords in English||micro-heater, NiCr, capillary sensor, multiparametric sensor, PWM regulation|
|Score|| = 15.0, 29-05-2020, BookChapterMatConfByConferenceseries|
= 15.0, 29-05-2020, BookChapterMatConfByConferenceseries
|Publication indicators||= 0; = 2; = 6.0|
|Citation count*||6 (2020-08-26)|
* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.