Characterization of thin Gd2O3 magnetron sputtered layers

Jacek Gryglewicz , Piotr Firek , Jakub Maciej Jasiński , Robert Paweł Mroczyński , Jan Szmidt

Abstract

Reactive magnetron sputtering technique using O2/Ar gas mixture was used to deposit Gd2O3 layers. Following metallization process of Al allowed to create MIS structures, which electrical parameters (κ, Dit, UFB, ρ, etc.) were measured using high frequency C-V equipment. Created layers exhibit high permittivity (κ≈12) at 100kHz. I-V measurements point out on maximum electric break down field Ebr≈0.4 MV/cm and maximum break down voltage Ubr ≈ 16V. Layers were morphologically tested using AFM technique (Ra ≈ 0.5÷2nm). Layer thicknesses as well as refractive indexes (RI ≈ 1.50÷2.05) were estimated using ellipsometry measurements.
Author Jacek Gryglewicz - [Wrocław University of Science and Technology]
Jacek Gryglewicz ,,
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, Piotr Firek (FEIT / MO)
Piotr Firek,,
- The Institute of Microelectronics and Optoelectronics
, Jakub Maciej Jasiński (FEIT / MO)
Jakub Maciej Jasiński,,
- The Institute of Microelectronics and Optoelectronics
, Robert Paweł Mroczyński (FEIT / MO)
Robert Paweł Mroczyński,,
- The Institute of Microelectronics and Optoelectronics
, Jan Szmidt (FEIT / MO)
Jan Szmidt,,
- The Institute of Microelectronics and Optoelectronics
Pages8902-81
Book Szczepański Paweł, Kisiel Ryszard, Romaniuk Ryszard (eds.): Proceedings of SPIE Electron Technology Conference 2013, vol. 1, no. 8902, 2013, P.O.Box 10, Bellingham, Washington 98227-0010 USA, SPIE, ISBN 9780819495211, 752 p., DOI:10.1117/12.2033297
Keywords in Englishmagnetron sputtering, Gd2O3
DOIDOI:10.1117/12.2031230
URL http://spie.org/x648.xml?product_id=2031230
Languageen angielski
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Characterization of thin Gd2O3 magnetron sputtered layers.pdf 648.13 KB
Score (nominal)15
Score sourceconferenceIndex
ScoreMinisterial score = 10.0, 25-06-2020, BookChapterMatConfByIndicator
Ministerial score (2013-2016) = 15.0, 25-06-2020, BookChapterMatConfByIndicator
Publication indicators Scopus Citations = 2; WoS Citations = 0; GS Citations = 4.0
Citation count*4 (2020-09-11)
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