Subtractive two-frame three-beam phase-stepping interferometry for testing surface shape of quasi-parallel plates

Zofia Sunderland , Krzysztof Patorski , Maciej Trusiak

Abstract

We present an effective method of testing the surface shape of quasi-parallel plates which requires only two phase-shifted three-beam interferograms. We derive a general formula for difference of two three-beam interferograms as a function of the phase shift value. The phase shift does not have to be precisely determined and uniform in the image domain. We show and compare results of extracting the fringe set and corresponding phase distribution related to the plate front surface shape using the two dimensional continuous wavelet transform, Hilbert-Huang transform and Fourier transform methods. Simulated and experimental data is used to verify the algorithm performance and robustness.
Author Zofia Sunderland IMiF
Zofia Sunderland,,
- The Institute of Micromechanics and Photonics
, Krzysztof Patorski IMiF
Krzysztof Patorski,,
- The Institute of Micromechanics and Photonics
, Maciej Trusiak IMiF
Maciej Trusiak,,
- The Institute of Micromechanics and Photonics
Journal seriesOptics Express, ISSN 1094-4087 []
Issue year2016
Vol24
No26
Pages30505-30513
Publication size in sheets0.5
Keywords in EnglishInstrumentation, Measurement, and Metrology
DOIDOI:10.1364/OE.24.030505
URL https://www.osapublishing.org/oe/abstract.cfm?uri=oe-24-26-30505
Languageen angielski
Score (nominal)45
ScoreMinisterial score = 40.0, 28-11-2017, ArticleFromJournal
Ministerial score (2013-2016) = 45.0, 28-11-2017, ArticleFromJournal
Publication indicators WoS Impact Factor: 2016 = 3.307 (2) - 2016=3.436 (5)
Citation count*0 (2018-06-23)
Cite
Share Share

Get link to the record
msginfo.png


* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
Back