Subtractive two-frame three-beam phase-stepping interferometry for testing surface shape of quasi-parallel plates

Zofia Sunderland , Krzysztof Patorski , Maciej Trusiak


We present an effective method of testing the surface shape of quasi-parallel plates which requires only two phase-shifted three-beam interferograms. We derive a general formula for difference of two three-beam interferograms as a function of the phase shift value. The phase shift does not have to be precisely determined and uniform in the image domain. We show and compare results of extracting the fringe set and corresponding phase distribution related to the plate front surface shape using the two dimensional continuous wavelet transform, Hilbert-Huang transform and Fourier transform methods. Simulated and experimental data is used to verify the algorithm performance and robustness.
Author Zofia Sunderland (FM / IMPh)
Zofia Sunderland,,
- The Institute of Micromechanics and Photonics
, Krzysztof Patorski (FM / IMPh)
Krzysztof Patorski,,
- The Institute of Micromechanics and Photonics
, Maciej Trusiak (FM / IMPh)
Maciej Trusiak,,
- The Institute of Micromechanics and Photonics
Journal seriesOptics Express, ISSN 1094-4087, []
Issue year2016
Publication size in sheets0.5
Keywords in EnglishInstrumentation, Measurement, and Metrology
ASJC Classification3107 Atomic and Molecular Physics, and Optics
Languageen angielski
Score (nominal)45
Score sourcejournalList
ScoreMinisterial score = 40.0, 06-07-2020, ArticleFromJournal
Ministerial score (2013-2016) = 45.0, 06-07-2020, ArticleFromJournal
Publication indicators Scopus Citations = 1; WoS Citations = 1; GS Citations = 3.0; Scopus SNIP (Source Normalised Impact per Paper): 2016 = 1.544; WoS Impact Factor: 2016 = 3.307 (2) - 2016=3.436 (5)
Citation count*3 (2020-09-23)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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