Ellipsometric spectroscopy as a tool for investigation of nanocrystals in ultrathin PECVD silicon layers’ behavior during high temperature annealing
Romuald Beck , Paweł Korb , Kamil Ber
|Publication size in sheets||0.3|
|Book||Barbier Daniel, Tomm Jens W., Boyd Ian W., Godlewski Marek (eds.): E-MRS Fall Meeting 2016, 2016, EMRS, 481 p.|
|Score|| = 15.0, 04-09-2019, BookChapterMatConfByConferenceseries|
= 15.0, 04-09-2019, BookChapterMatConfByConferenceseries
|Citation count*||2 (2020-06-17)|
* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.