Ellipsometric spectroscopy as a tool for investigation of nanocrystals in ultrathin PECVD silicon layers’ behavior during high temperature annealing
Romuald Beck , Paweł Korb , Kamil Ber
Abstract
E.P1.9Author | |
Pages | 111-111 |
Publication size in sheets | 0.3 |
Book | Barbier Daniel, Tomm Jens W., Boyd Ian W., Godlewski Marek (eds.): E-MRS Fall Meeting 2016, 2016, EMRS, 481 p. |
Language | en angielski |
Score (nominal) | 15 |
Score | = 15.0, 04-09-2019, BookChapterMatConfByConferenceseries = 15.0, 04-09-2019, BookChapterMatConfByConferenceseries |
Citation count* |
* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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