Ellipsometric spectroscopy as a tool for investigation of nanocrystals in ultrathin PECVD silicon layers’ behavior during high temperature annealing

Romuald Beck , Paweł Korb , Kamil Ber

Abstract

E.P1.9
Author Romuald Beck IMiO
Romuald Beck,,
- The Institute of Microelectronics and Optoelectronics
, Paweł Korb IMiO
Paweł Korb,,
- The Institute of Microelectronics and Optoelectronics
, Kamil Ber IMiO
Kamil Ber,,
- The Institute of Microelectronics and Optoelectronics
Pages111-111
Publication size in sheets0.3
Book Barbier Daniel, Tomm Jens W., Boyd Ian W., Godlewski Marek (eds.): E-MRS Fall Meeting 2016, 2016, EMRS, 481 p.
Languageen angielski
Score (nominal)15
ScoreMinisterial score = 15.0, 27-03-2017, BookChapterMatConf
Ministerial score (2013-2016) = 15.0, 27-03-2017, BookChapterMatConf
Citation count*0
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