Ellipsometric spectroscopy as a tool for investigation of nanocrystals in ultrathin PECVD silicon layers’ behavior during high temperature annealing
Romuald Beck , Paweł Korb , Kamil Ber
Abstract
E.P1.9| Author | |
| Pages | 111-111 |
| Publication size in sheets | 0.3 |
| Book | Barbier Daniel, Tomm Jens W., Boyd Ian W., Godlewski Marek (eds.): E-MRS Fall Meeting 2016, 2016, EMRS, 481 p. |
| Language | en angielski |
| Score (nominal) | 15 |
| Score | = 15.0, 04-09-2019, BookChapterMatConfByConferenceseries = 15.0, 04-09-2019, BookChapterMatConfByConferenceseries |
| Citation count* | 2 (2020-06-17) |
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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