Properties of silicon nitride thin overlays deposited on optical fibers – effect of fiber suspension in radio frequency plasma-enhanced chemical vapor deposition reactor

Mateusz Jakub Śmietana , Magdalena Dominik , Marcin Myśliwiec , Norbert Kwietniewski , Predrag Mikulic , Bartłomiej S. Witkowski , Wojtek J. Bock


This work discusses the effect of sample suspension in radio frequency plasma-enhanced chemical vapor deposition process on properties of the obtained overlays. Silicon nitride (SiNx) overlays were deposited on flat silicon wafers and cylindrical fused silica optical fibers. The influence of the suspension height and fiber diameter on SiNx deposition rate is investigated. It has been found that thickness of the SiNx overlay significantly increases with suspension height, and the deposition rate depends on fiber dimensions. Moreover, the SiNx overlays were also deposited on long-period gratings (LPGs) induced in optical fiber. Measurements of the LPG spectral response combined with its numerical simulations allowed for a discussion on properties of the deposited overlay. The measurements have proven higher overlay deposition rate on the suspended fiber than on flat Si wafer placed on the electrode. Results of this work are essential for precise tuning of the functional properties of new generations of optical devices such as optical sensors, filters and resonators, which typically are based on optical fibers and require the overlays with well defined properties.
Author Mateusz Jakub Śmietana (FEIT / MO)
Mateusz Jakub Śmietana,,
- The Institute of Microelectronics and Optoelectronics
, Magdalena Dominik (FEIT / MO)
Magdalena Dominik,,
- The Institute of Microelectronics and Optoelectronics
, Marcin Myśliwiec (FEIT / MO)
Marcin Myśliwiec,,
- The Institute of Microelectronics and Optoelectronics
, Norbert Kwietniewski (FEIT / MO)
Norbert Kwietniewski,,
- The Institute of Microelectronics and Optoelectronics
, Predrag Mikulic - [Universite du Quebec en Outaouais]
Predrag Mikulic,,
, Bartłomiej S. Witkowski - [Institute of Physics of the Polish Academy of Sciences]
Bartłomiej S. Witkowski,,
, Wojtek J. Bock - [Universite du Quebec en Outaouais]
Wojtek J. Bock,,
Journal seriesThin Solid Films, ISSN 0040-6090
Issue year2016
Publication size in sheets0.5
Keywords in EnglishThin Film; Silicon Nitride; Plasma-Enhanced Chemical Vapor Deposition; Long-Period Gratings; Optical Fiber
ASJC Classification2505 Materials Chemistry; 2506 Metals and Alloys; 2508 Surfaces, Coatings and Films; 3110 Surfaces and Interfaces; 2504 Electronic, Optical and Magnetic Materials
ProjectOptical Fiber Sensors with Nanofilms for Examination of Bioliquids. Project leader: Śmietana Mateusz Jakub, , Phone: (22) 234 63 64, application date 15-10-2010, start date 01-10-2011, end date 30-09-2014, IMiO/2010/NCBiR/1, Completed
WEiTI Projects financed by NCRD [Projekty finansowane przez NCBiR (NCBR)]
Languageen angielski
Score (nominal)30
Score sourcejournalList
ScoreMinisterial score = 30.0, 11-02-2020, ArticleFromJournal
Ministerial score (2013-2016) = 30.0, 11-02-2020, ArticleFromJournal
Publication indicators Scopus Citations = 4; WoS Citations = 3; GS Citations = 5.0; Scopus SNIP (Source Normalised Impact per Paper): 2016 = 0.881; WoS Impact Factor: 2016 = 1.879 (2) - 2016=1.771 (5)
Citation count*5 (2020-09-22)
Additional fields
AcknowledgementThe authors gratefully acknowledge support for this work from the National Centre for Research and Development of Poland within LIDER/03/16/L-2/10 project, and the Polish National Science Centre within 2011/03/D/NZ7/02054 project.
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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