Contactless methods of conductivity and sheet resistance measurement for semiconductors, conductors and superconductors

Jerzy Krupka

Abstract

Contactless methods of conductivity measurement are becoming increasingly important due to the progress being made in materials technology and the development of new materials intended for use in the electronics industry, including graphene, GaN and SiC. Despite the fact that they are conducting materials, some of them, like GaN and SiC, cannot be measured with the conventional four-point probe technique. Contactless measurement techniques offer fast and non-destructive methods to measure such materials. Selection of the appropriate method from the available techniques makes it possible to measure materials over a resistivity range of more than 20 decades, from 10−9 to 1012 � cm. This review gives an overview of the history of conductivity measurement, describes contactless measurement methods and discusses the most recent achievements in the field. Direct current, radio frequency, microwave and time domain measurement techniques are discussed in this review paper.
Author Jerzy Krupka (FEIT / MO)
Jerzy Krupka,,
- The Institute of Microelectronics and Optoelectronics
Journal seriesMeasurement Science & Technology, ISSN 0957-0233
Issue year2013
No24
Pages1-13
Keywords in Englishcontactless conductivity measurement, sheet resistance, mobility, thin films,
ASJC Classification2604 Applied Mathematics; 3105 Instrumentation
DOIDOI:10.1088/0957-0233/24/6/062001
Languageen angielski
Score (nominal)35
Score sourcejournalList
ScoreMinisterial score = 35.0, 25-05-2020, ArticleFromJournal
Ministerial score (2013-2016) = 35.0, 25-05-2020, ArticleFromJournal
Publication indicators Scopus Citations = 37; WoS Citations = 35; GS Citations = 50.0; Scopus SNIP (Source Normalised Impact per Paper): 2013 = 1.417; WoS Impact Factor: 2013 = 1.352 (2) - 2013=1.576 (5)
Citation count*50 (2020-09-06)
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* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.
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