Study of difluorochloromethane activation treatment on low substrate temperature deposited CdTe solar cells
A. Salavei , I. Rimmaudo , F. Piccinelli , Paweł Zabierowski , A. Romeo
AbstractIn this paper we describe a low substrate temperature CdTe fabrication process by vacuum evaporation (VE) where the recrystallization step avoids the use of CdCl2, which is a carcinogenic material. In our process CdS and CdTe are deposited at pressures of 10-6 mbar in the same chamber by thermal evaporation and with substrate temperature of 150 °C and 340 °C, respectively. The CdTe/CdS/TCO stacks are then put in a quartz chamber and, after having previously pumped the chamber down to 10-5 mbar, a controlled mixture of argon and chlorine containing gas is fluxed with a substrate temperature in a range between 400 °C and 450 °C. The morphological properties of the single layers are studied by X-ray diffraction (XRD), atomic force microscopy (AFM), cathodo-luminescence (CL) and the electrical properties of the finished devices are presented by means of current-voltage (I-V) and capacitance-voltage (C-V) measurements. © 2013 Elsevier B.V. All rights reserved.
|Journal series||Solar Energy Materials & Solar Cells, ISSN 0927-0248|
|Keywords in English||Activation treatment; Capacitance voltage measurements; Carcinogenic materials; CdCl2 treatment; CdS; CdTe; CdTe solar cells; Current voltage; Difluorochloromethane; Fabrication process; Low substrate temperature; Morphological properties; Quartz chambers; Single layer; Substrate temperature; Thin film solar cells, Argon; Atomic force microscopy; Cadmium chloride; Cadmium compounds; Cadmium sulfide; Crystallization; Deposits; Electric properties; Nanostructured materials; Quartz; Solar cells; Substrates; Thermal evaporation; Vacuum evaporation; X ray diffraction, Cadmium telluride|
|ASJC Classification||; ;|
|Score|| = 40.0, 01-01-2020, ArticleFromJournal|
= 40.0, 01-01-2020, ArticleFromJournal
|Publication indicators||= 16; : 2013 = 2.529; : 2013 = 5.03 (2) - 2013=5.471 (5)|
|Citation count*||7 (2015-03-27)|
* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.