Study of difluorochloromethane activation treatment on low substrate temperature deposited CdTe solar cells

A. Salavei , I. Rimmaudo , F. Piccinelli , Paweł Zabierowski , A. Romeo

Abstract

In this paper we describe a low substrate temperature CdTe fabrication process by vacuum evaporation (VE) where the recrystallization step avoids the use of CdCl2, which is a carcinogenic material. In our process CdS and CdTe are deposited at pressures of 10-6 mbar in the same chamber by thermal evaporation and with substrate temperature of 150 °C and 340 °C, respectively. The CdTe/CdS/TCO stacks are then put in a quartz chamber and, after having previously pumped the chamber down to 10-5 mbar, a controlled mixture of argon and chlorine containing gas is fluxed with a substrate temperature in a range between 400 °C and 450 °C. The morphological properties of the single layers are studied by X-ray diffraction (XRD), atomic force microscopy (AFM), cathodo-luminescence (CL) and the electrical properties of the finished devices are presented by means of current-voltage (I-V) and capacitance-voltage (C-V) measurements. © 2013 Elsevier B.V. All rights reserved.
Author A. Salavei
A. Salavei,,
-
, I. Rimmaudo
I. Rimmaudo,,
-
, F. Piccinelli
F. Piccinelli,,
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, Paweł Zabierowski (FP / SD)
Paweł Zabierowski,,
- Semiconductors Division
, A. Romeo
A. Romeo,,
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Journal seriesSolar Energy Materials & Solar Cells, ISSN 0927-0248
Issue year2013
Vol112
Pages190-195
Keywords in EnglishActivation treatment; Capacitance voltage measurements; Carcinogenic materials; CdCl2 treatment; CdS; CdTe; CdTe solar cells; Current voltage; Difluorochloromethane; Fabrication process; Low substrate temperature; Morphological properties; Quartz chambers; Single layer; Substrate temperature; Thin film solar cells, Argon; Atomic force microscopy; Cadmium chloride; Cadmium compounds; Cadmium sulfide; Crystallization; Deposits; Electric properties; Nanostructured materials; Quartz; Solar cells; Substrates; Thermal evaporation; Vacuum evaporation; X ray diffraction, Cadmium telluride
ASJC Classification2508 Surfaces, Coatings and Films; 2105 Renewable Energy, Sustainability and the Environment; 2504 Electronic, Optical and Magnetic Materials
DOIDOI:10.1016/j.solmat.2013.01.019
URL http://www.scopus.com/inward/record.url?eid=2-s2.0-84874583749&partnerID=40&md5=bc00376c2a514eecf60505804deb2955
Languageen angielski
Score (nominal)40
Score sourcejournalList
ScoreMinisterial score = 40.0, 01-01-2020, ArticleFromJournal
Ministerial score (2013-2016) = 40.0, 01-01-2020, ArticleFromJournal
Publication indicators WoS Citations = 16; Scopus SNIP (Source Normalised Impact per Paper): 2013 = 2.529; WoS Impact Factor: 2013 = 5.03 (2) - 2013=5.471 (5)
Citation count*7 (2015-03-27)
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