Miniaturization of sensors and influence of their thermal noise on measurement accuracy

A.A. Platonov , Jerzy Szabatin , V.E. Melnikov

Abstract

The influence of thermal fluctuations in the mechanical and electrical elements of microsensors on their measurement accuracy is considered. The limits of the minimum attainable measurement uncertainty as a function of the miniaturization degree of the sensor are evaluated. Possibilities of improvement of the sensor performance through optimal fitting of the sensor and ADC parameters are examined. Recommendations for an optimal choice of parameters of the analog part of the sensor as well of the ADC resolution are given. The analysis is based on the information-energetic theory of measurements, and on general results of statistical physics
Author A.A. Platonov
A.A. Platonov,,
-
, Jerzy Szabatin (FEIT / PE)
Jerzy Szabatin,,
- The Institute of Electronic Systems
, V.E. Melnikov
V.E. Melnikov,,
-
Journal seriesIEEE Transactions On Instrumentation And Measurement, ISSN 0018-9456
Issue year2000
Vol49
No5
Pages1018-1022
Keywords in EnglishADC resolution, analog part, Electromechanical sensors, fluctuations, information-energetic theory, intelligent sensors, measurement accuracy, measurement theory, measurement uncertainty, mechanical sensors, mechanical variables measurement, microsensors, noise measurement, optimal fitting, Sensor phenomena and characterization, Sensor systems, statistical analysis, statistical physics, thermal fluctuations, thermal noise, thermal sensors
ASJC Classification2208 Electrical and Electronic Engineering; 3105 Instrumentation
DOIDOI:10.1109/19.872923
Score (nominal)25
Score sourcejournalList
Publication indicators GS Citations = 2.0; Scopus SNIP (Source Normalised Impact per Paper): 2000 = 0.861; WoS Impact Factor: 2006 = 0.572 (2) - 2007=0.952 (5)
Citation count*2 (2020-09-15)
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