Miniaturization of sensors and influence of their thermal noise on measurement accuracy
A.A. Platonov , Jerzy Szabatin , V.E. Melnikov
AbstractThe influence of thermal fluctuations in the mechanical and electrical elements of microsensors on their measurement accuracy is considered. The limits of the minimum attainable measurement uncertainty as a function of the miniaturization degree of the sensor are evaluated. Possibilities of improvement of the sensor performance through optimal fitting of the sensor and ADC parameters are examined. Recommendations for an optimal choice of parameters of the analog part of the sensor as well of the ADC resolution are given. The analysis is based on the information-energetic theory of measurements, and on general results of statistical physics
|Journal series||IEEE Transactions On Instrumentation And Measurement, ISSN 0018-9456|
|Keywords in English||ADC resolution, analog part, Electromechanical sensors, fluctuations, information-energetic theory, intelligent sensors, measurement accuracy, measurement theory, measurement uncertainty, mechanical sensors, mechanical variables measurement, microsensors, noise measurement, optimal fitting, Sensor phenomena and characterization, Sensor systems, statistical analysis, statistical physics, thermal fluctuations, thermal noise, thermal sensors|
|Publication indicators||= 2.0; : 2000 = 0.861; : 2006 = 0.572 (2) - 2007=0.952 (5)|
|Citation count*||2 (2020-09-15)|
* presented citation count is obtained through Internet information analysis and it is close to the number calculated by the Publish or Perish system.