Recent Advances in Phase shifted Time Averaging and Stroboscopic Interferometry

Adam Styk , Michał Józwik

Abstract

Classical time-averaging and stroboscopic interferometry are widely used for MEMS/MOEMS dynamic behavior investigations. Unfortunately both methods require an extensive measurement and data processing strategies in order to evaluate the information on maximum amplitude at a given load of vibrating object. In this paper the modified strategies of data processing in both techniques are introduced. These modifications allow for fast and reliable calculation of searched value, without additional complication of measurement systems. Through the paper the both approaches are discussed and experimentally verified.
Author Adam Styk (FM / IMPh)
Adam Styk,,
- The Institute of Micromechanics and Photonics
, Michał Józwik (FM / IMPh)
Michał Józwik,,
- The Institute of Micromechanics and Photonics
Pages1-12
Publication size in sheets0.55
Article number99600A
Book Creath Katherine, Burke Jan, Albertazzi Gonçalves Armando: Interferometry XVIII, Proceedings of SPIE: The International Society for Optical Engineering, vol. 9960, 2016, SPIE - The International Society for Optics and Photonics, ISBN 9781510603110
Keywords in Polishinterferometria z uśrednianiem w czasie, interferometria stroboskopowa, analiza obrazów prążkowych, czasowa dyskretna zmiana fazy, badania drgań
Keywords in Englishtime averaging interferometry, stroboscopic interefrometry, fringe pattern analysis, temporal phase shifting, vibration investigations
DOIDOI:10.1117/12.2238519
URL http://spie.org/Publications/Proceedings/Paper/10.1117/12.2238519
Languageen angielski
Score (nominal)0
Publication indicators WoS Citations = 1; Scopus Citations = 3; Scopus SNIP (Source Normalised Impact per Paper) [Not active]: 2016 = 0.425
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